Rigid-flexible coupling galvanometer motor and control method thereof

Abstract

The invention relates to a rigid-flexible coupling galvanometer motor and a control method thereof. The rigid-flexible coupling galvanometer motor comprises a stator, a rotor rotating relative to thestator, a bearing seat and a grating encoder. The rotor comprises a rotating shaft, a rigid-flexible coupling bearing and a plurality of magnets; the rigid-flexible coupling bearing is mounted on therotating shaft; the rotor is positioned in the stator by the bearing seat through the rigid-flexible coupling bearing; the rigid-flexible coupling bearing comprises a rigid bearing and a flexible hinge ring capable of generating elastic deformation, wherein the flexible hinge ring is fixed in an inner ring of the rigid bearing; and the grating encoder is used for measuring the angular displacementof the rotating shaft. According to the method, the friction dead zone is overcome through elastic deformation of the flexible hinge ring, disturbance information in the motor movement process is estimated through the state observer ESO, and through rigid-flexible coupling design, the disturbance bandwidth of the ESO is reduced, the active disturbance rejection control performance is improved, and the control precision is improved.

Description

technical field [0001] The present invention relates to the technical field of vibrating mirror motors, and more specifically, to a rigid-flexible coupling vibrating mirror motor and a control method thereof. Background technique [0002] The galvanometer motor is a special swing motor, which is widely used in laser marking, laser engraving, laser drilling, stage lighting control, etc. Uncertain changes in the surface roughness between the moving pairs in the vibrating mirror motor will lead to uncertain changes in the magnitude of the frictional resistance, and during the start, stop and micro-feeding of the motor rotor, the speed of the motor rotor is relatively low, the above The amplitude fluctuation of frictional resistance can easily lead to the "crawling" phenomenon of the motion platform. Under the action of the closed-loop control system, the driver will increase the driving force to overcome the frictional resistance and compensate the positioning error of the vib...

AI Technical Summary

Problems solved by technology

[0006] Due to the differences in the microscopic characteristics of the contact surface between the kinematic pairs and manufacturing errors, it is difficult to establish a highly accurate friction model, resulting in the need for complex compensation control methods in the rotation control system

[0007] Low-friction kinematic pairs such as air bearings or magnetic bearings are expensive to implement, limiting their use

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