A real-time adjustment method for the stiffness of the probe of an atomic force microscope

An atomic force microscope and real-time adjustment technology, applied in scanning probe technology, scanning probe microscopy, instruments, etc., can solve problems such as narrow application range, complex structure, and cantilever beam failure, so as to reduce probe loss and work The effect of a wide range and a large adjustment range
CN110954714BActive Publication Date: 2021-10-19JIANGSU JICUI MICRO NANO AUTOMATION SYST & EQUIP TECH RES INST CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
JIANGSU JICUI MICRO NANO AUTOMATION SYST & EQUIP TECH RES INST CO LTD
Publication Date
2021-10-19

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Abstract

The invention discloses a real-time adjustment method for the stiffness of a probe of an atomic force microscope, which comprises the following steps: coating a stiffness adjustment layer on the cantilever beam to form a cantilever-coating composite; changing the stiffness adjustment layer temperature to change the stiffness of a cantilever-coated composite. The stiffness of the probe can be adjusted in real time, without frequent replacement of the probe, reducing the loss of the probe, with a large adjustment range, a wide working range, and good stability.
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Description

technical field

[0001] The invention relates to the technical field of atomic force microscopes, in particular to a real-time adjustment method for the stiffness of a probe of an atomic force microscope. Background technique

[0002] The atomic force microscope uses a special tiny probe to scan the surface of the sample material in the left and right and front and rear directions, and uses the scanner's ability to fine-tune in the vertical direction to keep the force between the probe and the material surface constant during the scanning process. The vertical fine-tuning distance of each point during the scanning process is recorded, and the three-dimensional topography of the material surface can be characterized.

[0003] At the same time, the atomic force microscope presses the probe tip into and out of the material surface, obtains the force-displacement curve through the sensor, and calculates the curve to obtain the Young's modulus and hardness of the measured material...

Claims

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