Method for manufacturing monocrystalline silicon SE-PERC battery through secondary annealing
A technology of an infrared laser and a manufacturing method, applied in the field of solar cells, can solve the problems of reducing the photoelectric conversion efficiency, damage, open voltage and short-circuit current of crystalline silicon cells of a single crystal silicon SE-PERC cell, and reduce carriers. Compounding, improving open pressure and short flow, repairing the effect of damage
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[0023] The specific embodiments of the present invention will be described in further detail below in conjunction with the drawings and embodiments. The following examples are used to illustrate the present invention, but not to limit the scope of the present invention.
[0024] Such as Figure 1~2 As shown, an infrared laser annealing single crystal silicon SE-PERC battery manufacturing method, the steps include:
[0025] 1. Texturing: using wet technology to form a texturing surface on the surface of the P-type monocrystalline silicon wafer;
[0026] 2. Diffusion: P-N junction is formed by diffusion;
[0027] 3. Front laser: prepare selective emitter and use laser to do heavy doping on the surface of silicon wafer;
[0028] 4. Infrared laser annealing: repair the damage to the surface of the silicon wafer caused by the front laser, and passivate the surface to reduce carrier recombination.
[0029] 5. Etching: Use HF / HNO3 solution for back polishing, and use HF to remove phosphosilica...
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