Large-scale integral thin-wall carbon/ceramic composite material gas limiting cylinder and preparation method thereof

Abstract

The invention discloses a large-scale integral thin-wall carbon/ceramic composite material gas limiting cylinder and a preparation method thereof. The gas limiting cylinder comprises a cylinder body and is characterized in that a glass fiber cloth soaked with a modifier and a carbon fiber cloth pre-soaked with an adhesive are compounded into a hybrid fiber cloth, the hybrid fiber cloth is wound toobtain the cylinder body, and then the cylinder body is subjected to high-temperature treatment to obtain the gas limiting cylinder. The method has remarkable progress and good comprehensive performance, the preparation cost is greatly reduced, the use cost can also be greatly reduced for use enterprises, and the preparation efficiency of monocrystalline silicon is improved.

Description

Technical field: [0001] The invention relates to a composite material, in particular to a gas-limiting cylinder prepared from a thin-walled carbon / ceramic composite material with an integral structure and a preparation method thereof. Background technique: [0002] The monocrystalline silicon drawing furnace is the main equipment for the production of monocrystalline silicon. In actual use, a heat limiting structure or thermal field structure must be installed, such as commonly used crucible sides, draft tubes, heat shields, heating elements, etc. , the above-mentioned heat limiting structure is generally prepared by carbon / carbon composite materials. Carbon / carbon composite materials have good high temperature performance and heat insulation performance, but the disadvantage is that they are easy to oxidize at high temperatures and reduce performance. In addition, in the case of small wall thickness Lower strength is also more susceptible. Therefore, the use mission of the...

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Problems solved by technology

[0002] The monocrystalline silicon drawing furnace is the main equipment for the production of monocrystalline silicon. In actual use, a heat limiting structure or thermal field structure must be installed, such as commonly used crucible sides, draft tubes, heat shields, heating elements, etc. , the above-mentioned heat limiting structure is generally prepared by carbon / carbon composite materials. Carbon / carbon composite materials have good high temperature performance and heat insulation performance, but the disadvantage is that they are easy to oxidize at high temperatures and reduce performance. In addition, in the case of small wall thickness Lower strength is also more susceptible to

Therefore, the use mission of the above-mentioned calorie-limiting structure prepared by carbon / carbon composite materials is relatively short, which leads to the frequent shutdown of the aforementioned single crystal silicon drawing furnace for maintenance and replacement of spare parts, resulting in a large waste of energy, confusion in the production process, and substantial production costs. Seriously, the above-mentioned heat limiting structure is burned through, cracked or damaged, resulting in contamination or damage of single crystal silicon

In particular, in order to increase production capacity and reduce production costs, enterprises adopt ultra-large multi-column (6-10 material column) CVD furnaces. Each super-large CVD furnace requires dozens of sets of carbon / carbon gas limiting cylinders. However, such large or large The size of the gas cylinder is processed with carbon / carbon composite material or graphite, and the strength performance is not enough. It is prepared by the existing prefabricated body CVD method. The prefabricated body is not rigid enough, easy to deform, and there are problems of easy oxidation, so the above-mentioned prior art can be overcome. Insufficiency is still an urgent problem to be solved

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