Deep ultraviolet band composite sensitivity spectrometer
A spectrometer and sensitivity technology, which is applied in the field of spectrometers, can solve the problems of bulky size and low confidence in measurement results, and achieve the effects of reducing volume, improving spectral resolution, and increasing the number of total lines
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[0023] The content of the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0024]The invention provides a novel spectrometer with reflection type and double spectrometers sharing one recording device. The device is a composite sensitivity spectrometer applied to deep ultraviolet band (150nm-220nm). It realizes the combination of two spectrometers into one by interspersing and folding the optical paths of two spectrometers, and overlaps the outputs of the two to share a recording device (stripe camera), which greatly reduces the volume of the device. In use, in order to prevent the image overlap problem of the dual spectrometer, the focal length of the ion spectrometer is designed to be larger; on the one hand, the effective grating area is increased, and the spectral resolution ability of the spectrometer is improved; on the other hand, the The optical path of the ion spectrometer is such that...
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