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Solar cell epitaxial structure and substrate stripping method thereof

A technology of solar cells and epitaxial structures, applied in the field of solar cells, can solve problems such as high cost, and achieve the effects of improving efficiency, alleviating peeling pull force, and increasing contact area

Pending Publication Date: 2020-05-29
紫石能源有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Most GaAs cells are prepared on expensive single crystal substrates such as GaAs, SiC, so the cost is high

Method used

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  • Solar cell epitaxial structure and substrate stripping method thereof
  • Solar cell epitaxial structure and substrate stripping method thereof
  • Solar cell epitaxial structure and substrate stripping method thereof

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Embodiment Construction

[0027] In order to enable those skilled in the art to better understand the technical solution of the present invention, a solar cell epitaxial structure provided by the present invention and its substrate peeling method will be described in further detail below with reference to the accompanying drawings and specific embodiments.

[0028] In order to solve the existing technical problem of low peeling efficiency of solar cell substrates, the present embodiment provides a solar cell epitaxial structure, such as figure 1 As shown, it includes a substrate 1 to be peeled off and a sacrificial layer 2 and a battery layer 3 arranged on the substrate to be peeled 1. Along the direction away from the substrate 1 to be peeled off, the sacrificial layer 2 and the battery layer 3 are arranged in sequence, and the sacrificial layer 2 Used to assist the separation of the substrate 1 to be peeled off from the battery layer 3, the sacrificial layer 2 includes at least one laminated unit. Along t...

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Abstract

The invention provides a solar cell epitaxial structure and a substrate stripping method thereof. The solar cell epitaxial structure comprises a to-be-stripped substrate, as well as a sacrificial layer and a cell layer which are arranged on the to-be-stripped substrate; the sacrificial layer and the cell layer are arranged in sequence along a direction away from the to-be-stripped substrate; the sacrificial layer comprises at least one laminated unit; the laminated units are laminated in sequence; each laminated unit comprises a first aluminum arsenide layer and a second aluminum arsenide layer which are laminated with each other, wherein the first aluminum arsenide layer and the second aluminum arsenide layer are both n-type doped layers; and the doping concentrations of the first aluminum arsenide layer and the second aluminum arsenide layer are different. The sacrificial layer in the solar cell epitaxial structure can increase the contact area with wet etching liquid in a wet etching process, and therefore, the efficiency of the wet etching and the stripping efficiency of the to-be-stripped substrate are improved; and the sacrificial layer can also alleviate a stripping pullingforce generated between the battery layer and the to-be-stripped substrate in the stripping process of the substrate, and therefore, the separation yield of the to-be-stripped substrate and the battery layer can be improved.

Description

Technical field [0001] The invention relates to the technical field of solar cells, in particular to a solar cell epitaxial structure and a method for peeling off the substrate thereof. Background technique [0002] Gallium arsenide (GaAs) has a band gap of 1.43ev, which is one of the most preferred materials for absorbing sunlight. Solar cells made of gallium arsenide have the characteristics of high conversion efficiency, good temperature characteristics, and strong radiation resistance. GaAs solar cells The application is more and more extensive. [0003] Most GaAs batteries are prepared on expensive single crystal substrates such as GaAs and SiC, so the cost is high. Substrate stripping technology provides necessary technical support for the development of solar cells towards thin film. The repetitive use of the substrate also reduces the manufacturing cost of thin-film solar cells, and reduces environmental pollution and waste of resources during the manufacturing process. ...

Claims

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Application Information

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IPC IPC(8): H01L31/042H01L31/18
CPCH01L31/042H01L31/184Y02E10/544Y02P70/50
Inventor 罗轶李琳琳宋士佳
Owner 紫石能源有限公司
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