Vertical cavity surface emitting laser, manufacturing method and application thereof

Abstract

The invention provides a vertical cavity surface emitting laser, a manufacturing method and an application thereof. The laser comprises a substrate, a first reflecting layer, at least two light-emitting units, a first groove, an insulating layer, a first electrode and at least two second electrodes, wherein the first reflecting layer is formed on the substrate; the at least two light-emitting units are formed on the first reflecting layer, and each light-emitting unit includes at least two light-emitting subunits; the first groove is formed between the at least two light-emitting units, and the first groove is exposed out of the substrate; the insulating layer is formed in the first groove; the first electrode is formed on the at least two light-emitting units and connected with the at least two light-emitting units, and the light-emitting subunits in each light-emitting unit are connected through the first electrode to form a common anode; the at least two second electrodes in contactwith the first reflecting layer; and the first electrode covers the light-emitting subunits, and light emitted by the light-emitting subunits is emitted through the substrate. The vertical cavity surface emitting laser provided by the invention is high in application frequency.

Description

technical field [0001] The invention relates to the technical field of lasers, in particular to a vertical cavity surface emitting laser and its manufacturing method and application. Background technique [0002] The Vertical Cavity Surface Emitting Laser (VCSEL) is a new type of laser that emits light from the vertical surface. The structure different from the traditional edge emitting laser brings many advantages: the circular symmetrical far and near field distribution greatly improves the coupling efficiency with the optical fiber , without the need for complex and expensive beam shaping systems, it has been proven that the coupling efficiency with multimode fibers can be greater than 90%; the length of the optical cavity is extremely short, resulting in a widening of the longitudinal mode spacing, which can be realized in a wide temperature range Single longitudinal mode operation, high dynamic modulation frequency; the reduction in cavity volume makes its spontaneous e...

AI Technical Summary

Problems solved by technology

[0003] The traditional VCSEL uses a common cathode method, which makes it impossible for the drive system to choose a smaller and faster N-MOS driver. At the same time, the anode and cathode of the traditional VCSEL need to be wired

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