White light interference measurement device and method based on sample space structure illumination
A technology of white light interference and spatial structure, applied in the direction of measuring devices, optical devices, image data processing, etc., can solve the problems of inapplicability, poor applicability, long measurement time, etc., and achieve suppression of signal interference, wide application range, The effect of high signal-to-noise ratio
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0036] Example 1:
[0037] Such as figure 1 As shown, a white light interferometry device illuminated according to the sample space structure includes a coherent scanning interferometric system and a patterned illumination system;
[0038] The coherent scanning interference system is composed of an interference objective lens 1, a scanner 2, a tube lens 3 and an image sensor 4; the interference objective lens 1 is mounted on the scanner 2; the pattern illumination system is composed of an interference objective lens 1, a projection lens 5 and The microdisplay 6 is composed of the coherent scanning interference system and the patterned illumination system using the same interference objective lens 1, the coherent scanning interference system and the patterned illumination system are combined through a beam splitter 7 in a posture where the optical axes are perpendicular to each other, the image sensor 4 is conjugated with the object plane of the interference objective lens 1, and th...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap