Method for adjusting beam divergence angle of vertical cavity surface emitting semiconductor laser
A technology of vertical cavity surface emission and beam divergence angle, applied in the direction of semiconductor lasers, lasers, laser components, etc., can solve the problems that the current density affects the reliability of VCSEL, the light-emitting area limits the maximum output power of VCSEL, etc., to ensure the maximum output power and reliability effects
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[0015] The implementation of the present invention will be described in detail below with reference to the drawings and examples, so as to fully understand and implement the implementation process of how to use technical means to solve technical problems and achieve technical effects in the present invention.
[0016] A method for adjusting the beam divergence angle of a vertical cavity surface-emitting semiconductor laser, using epitaxial technology to sequentially grow an N-type semiconductor reflective layer, an active layer, and a P-type semiconductor reflective layer on a semiconductor substrate; the N-type semiconductor reflective layer and the P The type semiconductor reflection layer is a plurality of pairs of distributed Bragg mirror layers composed of two semiconductor materials with different refractive indices;
[0017] The P-type semiconductor DBR has a reduced logarithm;
[0018] A certain logarithm of the dielectric DBR layer is fabricated on the P-type semicond...
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