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Method for manufacturing cell distribution analyzer

A technology for analyzing devices and cells, applied in the field of biomedicine, can solve the problems of time-consuming, expensive flow cytometer and high cost

Pending Publication Date: 2020-06-09
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, on the one hand, flow cytometry has technical defects such as large errors and long time-consuming in the analysis of cell distribution.
On the other hand, flow cytometers are expensive and costly to use, and the cost of using this device for medical testing is high, thereby increasing people's experiments and living costs

Method used

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  • Method for manufacturing cell distribution analyzer

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] The manufacturing method of the cell distribution analysis device of the present invention comprises the following steps:

[0036] Silicon wafer cleaning: first put the silicon wafer into a solution of concentrated sulfuric acid and hydrogen peroxide (4:1) in a glass vessel and heat it to 80°C for 30 minutes, then take out the silicon wafer and wash it with deionized water for 3 minutes; configure 1:80 BOE (Oxide etching buffer) silicon oxide etching solution, put the silicon wafer into the BOE solution and etch for 1 minute to remove the silicon oxide on the surface; remove the silicon wafer and wash it in deionized water for 3 minutes; use a nitrogen gun to clean the silicon wafer blow dry.

[0037] Silicon wafer etching: Spin-coat photoresist S1803 on the cleaned silicon wafer, spin-coat at 2000 rpm, bake at 80°C for 3 minutes, and then use the UV exposure machine and the designed photolithography plate to test the photoresist S1803 on the silicon wafer. The photore...

Embodiment 2

[0041] The manufacturing method of the cell distribution analysis device of the present invention comprises the following steps:

[0042] Silicon wafer cleaning: first put the silicon wafer into concentrated sulfuric acid and hydrogen peroxide solution in a glass container and heat it to 120 ° C for 10 minutes, then take out the silicon wafer and wash it with deionized water for 10 minutes; configure 1:120 BOE (oxide etching buffer solution) silicon oxide etching solution, put the silicon wafer into the BOE solution and etch for 3 minutes to remove the silicon oxide on the surface; remove the silicon wafer and wash it in deionized water for 10 minutes; dry the silicon wafer with a nitrogen gun.

[0043] Silicon wafer etching: Spin-coat photoresist on the cleaned silicon wafer at a spin-coating speed of 4000 rpm, bake at 110°C for 1 minute, and then use a UV exposure machine and a designed photoresist plate to illuminate the photoresist on the silicon wafer. The resist is expos...

Embodiment 3

[0047] The manufacturing method of the cell distribution analysis device of the present invention comprises the following steps:

[0048] Silicon wafer cleaning: first put the silicon wafer into a concentrated sulfuric acid and hydrogen peroxide (4:1) solution in a glass vessel and heat it to 100°C for 20 minutes, then take out the silicon wafer and wash it with deionized water for 5 minutes; configure 1:100 BOE (Oxide etching buffer) silicon oxide etching solution, put the silicon wafer into the BOE solution and etch for 1 minute to remove the silicon oxide on the surface; remove the silicon wafer and wash it in deionized water for 5 minutes; use a nitrogen gun to clean the silicon wafer blow dry.

[0049] Silicon wafer etching: Spin-coat photoresist S1803 on the cleaned silicon wafer, spin coating at 3000 rpm, bake at 95°C for 1 minute, and then use a UV exposure machine and a designed photolithography plate to process the photoresist S1803 on the silicon wafer. The photore...

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Abstract

The invention discloses a manufacturing method of a cell distribution analysis device. The cell distribution analysis device manufactured by the method is used for analyzing type distribution of cells, an error is small, precision is high, the consumed time is short, and cost is low. The method comprises steps that a microfluidic chip is prepared, a model microgroove array is manufactured on a model substrate, and the volume of each model microgroove ranges from 0.1-10nl, the model microgroove array is transferred to a flexible material to form a microfluidic chip with a cell microgroove arrayon the surface, the volume of each cell microgroove is 0.1-10 nl, and hydrophilic treatment of the surface of the micro-fluidic chip with the cell micro-groove array formed on the surface is carriedout.

Description

technical field [0001] The invention belongs to the field of biomedicine. Background technique [0002] In the field of modern biomedicine, information such as cell surface markers, intracellular antigenic substances, cell receptors, DNA and RNA content of tumor cells, and immune cell functions need to be analyzed and measured. [0003] In the prior art, in addition to the method of manually analyzing the cell distribution, the equipment for automatic cell distribution analysis generally adopts a flow cytometer. Flow cytometry can quickly measure, store, and display a series of important biophysical and biochemical characteristic parameters of dispersed cells suspended in liquid, and can analyze specified cell subgroups from them according to the pre-selected parameter range . [0004] However, on the one hand, flow cytometry has technical defects such as large errors and long time consumption when performing cell distribution analysis. On the other hand, the flow cytomet...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N15/10B01L3/00B81C1/00B81C3/00
CPCB01L3/5027B81C1/00119B81C3/001G01N15/10G01N2015/1006
Inventor 韩琳张宇
Owner SHANDONG UNIV
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