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Device and method for detecting defects of lobster eye optical device square hole array structure

A technology of array structure and vision, applied in the field of lobster eye lens, can solve the problem that the development process cannot achieve accurate positioning and guidance, and achieve the effect of qualitative and quantitative analysis, improvement of process parameters, and high test accuracy.

Active Publication Date: 2020-06-09
NORTH NIGHT VISION TECH
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Problems solved by technology

Most of the structural defects of MPO reported in the literature are numerical simulation and analysis. At present, there is no set of detection devices and methods for the structural defects of the square hole array of lobster eye optical devices at home and abroad, which leads to the inability to accurately locate and guide the development process.

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  • Device and method for detecting defects of lobster eye optical device square hole array structure

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Embodiment Construction

[0048] In order to better understand the technical content of the present invention, specific embodiments are given and described below in conjunction with the accompanying drawings.

[0049] Aspects of the invention are described in this disclosure with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be understood that the various concepts and embodiments described above, as well as those described in greater detail below, can be implemented in any of a number of ways, as the concepts and embodiments disclosed herein do not limited to any implementation. Additionally, some aspects of the present disclosure may be used alone or in any suitable combination with other aspects of the present disclosure.

[0050] combine figure 1 As shown, an apparatus for detecting structural defects of a lobster eye optical devi...

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Abstract

The invention relates to the technical field of lobster eye devices. The invention discloses a device and a method for detecting defects of a lobster eye optical device square hole array structure. The device comprises an X-ray light tube, an optical slit, a multi-axis displacement table, a detector and a data analysis system, wherein the lobster eye optical device is arranged between the X-ray light tube and the detector, the optical slit is arranged between the X-ray light tube and the lobster eye optical device, the lobster eye optical device is installed on the X-ray light tube, and the centers of the X-ray light tube, the lobster eye optical device, the optical slit and the detector are coaxial and correspondingly flush. By combining lobster eye optical focusing and a small hole X-rayimaging method, the square hole structure defects of different lobster eye optical devices, especially the deformation condition in a high-temperature preparation environment (hot bending), are tested so as to be beneficial to optimizing the focusing imaging quality of the lobster eye optical devices in the later period.

Description

technical field [0001] The invention relates to the technical field of lobster eye lenses, in particular to a device and method for detecting structural defects of a square hole array of a lobster eye optical device. Background technique [0002] In 1979, Angel proposed to develop a lobster-eye X-ray astronomical telescope based on a square array structure based on the lobster-eye structure. The lobster eye optical device has the advantages of large field of view, small size, light weight, high sensitivity, simple installation and high focusing efficiency, and meets the needs of the future development of satellite payload X-ray astronomical observation. Therefore, it has a huge application in the field of X-ray focusing imaging. prospect. However, subject to the structural level at that time, breakthrough progress has never been achieved. With the development of etching technology and micromachining technology, it was not until the 1990s that Columbia University, Universit...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/18
CPCG01N23/18
Inventor 黎龙辉金戈顾燕王健张振孙建宁廖亦戴吴超徐昭姜博文
Owner NORTH NIGHT VISION TECH
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