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Methods for gas generation in a sealed gas cell cavity

A cavity and gas technology, which can be used in container discharge methods, container filling methods, gas/liquid distribution and storage, etc., and can solve the problems of difficult and expensive control of environmental conditions.

Active Publication Date: 2020-06-19
TEXAS INSTR INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, controlling environmental conditions during cavity sealing operations can be difficult and expensive

Method used

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  • Methods for gas generation in a sealed gas cell cavity
  • Methods for gas generation in a sealed gas cell cavity
  • Methods for gas generation in a sealed gas cell cavity

Examples

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Embodiment Construction

[0018] In the drawings, similar reference numbers always refer to similar elements, and various features are not necessarily drawn to scale.

[0019] figure 1 The method 100 for manufacturing a gas chamber and generating the desired target gas inside the sealed cavity is shown. figure 2 Shown is a rotational transition-based clock device 200 with a dipole gas cell 201 and an associated transceiver circuit 230 for providing a reference clock signal. Method 100 can be used with a variety of target gas chamber gases to use low-cost packaging and manufacturing processes to facilitate wafer-level or chip-level rotating spectroscopy chambers or gas chambers 201 in silicon-based processes to provide compact, energy-efficient Efficient rotating transition clock system 200. The chamber is useful in atomic clocks and other applications.

[0020] Target gas molecules (for example, water or H 2 O) It has a defined quantum rotation state transition, and when transitioning between rotation sta...

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Abstract

Described examples include a gas cell (201), including a cavity (203) in a first substrate (202), a nonvolatile precursor material in the cavity (203), and a second substrate (206) bonded to the firstsubstrate (202) to seal the cavity (203). The precursor material is activated after or during forming the sealed cavity (203) to release a target gas inside the sealed cavity (203).

Description

Background technique [0001] In the microwave to millimeter wave (mm-wave) region, molecular spectroscopy can be used to construct microwave or millimeter wave atomic clocks and other systems that require accurate timing signals. The atomic clock uses laser or millimeter-wave radiation triggered by an RF transceiver to excite the gas in the gas chamber, and the system detects the rotational quantum transition of the dipole molecule as a reference. The gas chamber is ideally a gas-tight environment that contains the desired target gas at a stable low pressure. Through the use of advanced mass flow controllers and similar equipment during the sealing of the air chamber cavity, a moderate vacuum environment can be generated while controlling a known amount of volatile species. However, during cavity sealing operations, controlling environmental conditions can be difficult and expensive. Summary of the invention [0002] To fabricate a gas chamber and generate a target gas inside th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F17C13/00F17C3/00H03L7/26G21K5/08G04F5/14
CPCG04F5/14H03L7/26C23C16/403C23C16/45525B29C65/14C23C16/56B29L2031/34B29C66/034B29C66/112H05K2201/09836
Inventor S·J·雅各布斯J·A·赫布佐默A·J·弗吕林
Owner TEXAS INSTR INC