Liquefied ultra-pure ozone preparation device

Abstract

The invention provides a liquefied ultra-pure ozone preparation device, which is used for solving the technical problem that in the prior art, high-purity ozone cannot be rapidly, safely and stably prepared through small equipment. The device comprises an oxygen source module, an ozone generation module, an ozone purification cavity, a liquefaction pool, a heat conduction plate, a liquefaction pool temperature control module, a Stirling refrigerator, a refrigerator supporting device, a copper braid, a gas sucking module and a tail gas treatment module. According to the device, the Stirling refrigerator is adopted for cooling, heat is conducted through the copper braid, the vibration problem of the Stirling refrigerator is solved through the multiple damping design, the liquefaction pool temperature control module is arranged to be used for controlling and maintaining a purification temperature zone, and under certain air pressure, ozone gas is liquefied, and oxygen is pumped away by the gas sucking module, so that preparation of ultra-pure ozone is achieved; and by implementing the technical scheme provided by the invention, the technical effect of quickly, safely and stably preparing high-purity ozone by small equipment can be achieved.

Description

Technical field [0001] The invention relates to the technical field of ozone production and storage, in particular to a liquefied ultra-high purity ozone preparation device. Background technique [0002] Ozone is a gas with diverse functions and great development value. It is widely used in many fields such as scientific research, semiconductor manufacturing, film preparation, water treatment, air purification, medical and health, food processing, etc. However, because ozone gas is easily decomposed into oxygen, Can not be stored for a long time; and liquid ozone has the risk of explosion, which is not conducive to storage and transportation, so ozone gas is basically ready to use. [0003] Different application scenarios have different requirements for ozone concentration. Some scenarios have lower requirements for ozone concentration, such as hotels, supermarkets, schools, food factories, food storage and storage, fresh food distribution centers, and other industrial environments...

AI Technical Summary

Problems solved by technology

[0004] Chinese patent (patent No. CN204057961U) discloses a high-purity ozone extraction quartz device. A special multi-layer quartz device is designed by utilizing the different boiling points of oxygen and ozone, which provides a temperature environment between the boiling points of ozone and oxygen. Ozone purification is achieved by adsorbing ozone on color-changing silica gel, and the final ozone concentration can reach 80-90%, but the preparation process takes a long time, and there is still a lot of room for improvement in purity

But this device has the following three disadvantages: the first is that it takes about 60 minutes for the device to go from a room temperature state to a state where ozone can be purified, and the preparation time for ozone purification is very long; the second is an ozone processor, which needs to be heated to 400°C To decompose ozone, there is a safety hazard, and a cooling device is required to lower the heated gas to room temperature, and the structure is complicated; the third is that the accuracy of the filter device entering the liquefaction pool still has room for improvement

However, the size of the cooling machine used in this type of technology is relatively large, and the volume of the liquefaction tank and other supporting components is also relatively large. Due to the large number of supporting devices designed, it is impossible to simply reduce the size and power of the equipment to achieve miniaturization of the equipment, so It cannot adapt to the application scenarios of small places and small demand such as research laboratories. At the same time, it has the disadvantage of a long time for ozone preparation, and there is still room for further improvement in ozone concentration.

[0007] To sum up, there is a lack of equipment in the market that is suitable for the laboratory environment and can quickly realize the preparation of ultra-high-purity ozone

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