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A fine metal mask manufacturing method suitable for high ppi

A technology of fine metal mask and manufacturing method, which is applied in the field of high PPI fine metal mask manufacturing, can solve the problems of high production input cost, low success rate, and difficult manufacturing, and achieve the effect of avoiding low yield rate

Active Publication Date: 2022-05-24
山东奥莱电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Aiming at the deficiencies of the existing high-PPI fine metal mask plate, such as thin mask, difficult manufacture, low success rate, high cost of raw materials, equipment cost, and high production input cost, the simple low-PPI mask product is stretched first, and then Smaller high PPI openings are formed after coating PI and exposure and development to achieve high PPI mask sheet stretching

Method used

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  • A fine metal mask manufacturing method suitable for high ppi
  • A fine metal mask manufacturing method suitable for high ppi
  • A fine metal mask manufacturing method suitable for high ppi

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Embodiment 1

[0024] A method for manufacturing a fine metal mask suitable for high PPI, comprising the following manufacturing steps:

[0025] (1) According to the arrangement of high PPI pixels, prepare the corresponding low PPI fine metal mask: a. Including the mask metal frame, the netting machine, and several low PPI masks; b. The low PPI mask is the reason Tile alloy, the thickness is 20-30μm, and the PPI is 100-200; c. The low-PPI masks are respectively stretched, and the mask is grasped, aligned, stretched and welded on the metal by using a net-stretching machine. On the frame, after all mask welding is completed, it is a low PPI mask product;

[0026] (2) Use a net stretching machine to stretch the low PPI mask and weld it to the frame to make a semi-finished fine metal mask. After the net is completed, the mask is coated with PI to form a film layer: a. Including PI coating Covering equipment and substrate filling block; b. The substrate filling block is polyethylene material wit...

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Abstract

The invention relates to the technical field of metal mask making, in particular to a method for making a fine metal mask suitable for high PPI. It includes the following manufacturing steps: (1) According to the arrangement of high PPI pixels, prepare the corresponding low PPI fine metal mask plate; (2) Use a netting machine to stretch the low PPI mask and weld it to the frame to form a Semi-finished fine metal mask plate, after the netting is completed, the mask is coated with PI to form a film layer; (3) Use an exposure machine to expose the semi-finished product coated with PI, that is, to define the graphics, and then develop to complete the graphics. Some large openings are processed with small openings to form a high PPI mask opening effect. In the present invention, a simple low-PPI mask product is firstly stretched, and then small high-PPI openings are formed through coating PI, exposure and development, so as to realize high-PPI mask sheet stretching. The hole opening effect of high PPI is achieved, and the problems of low yield rate, thin raw material, and difficult etching that occur when etching a high PPI mask are avoided.

Description

technical field [0001] The invention relates to the technical field of metal mask manufacturing, in particular to a method for manufacturing a fine metal mask suitable for high PPI. Background technique [0002] FINE METAL MASK (FMM) is a consumable key component in the OLED evaporation process. Its main function is to deposit RGB organic materials and form pixels in the OLED production process, accurately and finely where needed. Deposit organic materials to improve resolution and yield. In view of the high requirements on the thermal expansion performance of the fine metal mask material in the evaporation process, the mask (Mask Sheet) of the fine metal mask generally uses Invar as the raw material. At present, the PPI of mainstream OLED screen mobile phones is between 400-500, and some high-end mobile phone OLED screens can reach 550PPI. The traditional fine metal mask mask production adopts the etching method, but the etching method is more difficult to produce high pi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/04C23C14/24C23C14/12
CPCC23C14/042C23C14/24C23C14/12
Inventor 隋鑫宋平晁亮尹小江
Owner 山东奥莱电子科技有限公司
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