Corrosion-resistant glass and preparation method thereof
A corrosion-resistant, glass-based technology, applied in coatings and other directions, can solve problems that affect the use effect, poor product stability, and lack of corrosion resistance
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[0024] The present invention provides a method for preparing corrosion-resistant glass described in the above technical solution, comprising the following steps: using magnetron sputtering to coat a corrosion-resistant film on the surface of a glass substrate to obtain corrosion-resistant glass; the sputtering target is composed of titanium, An alloy of at least two of the elements aluminum, chromium, and nickel.
[0025] In the present invention, the glass substrate is preferably cleaned first, and then the corrosion-resistant film is sputtered. In the present invention, there is no special limitation on the specific method of the cleaning treatment, and the impurities on the surface of the glass substrate can be removed by using a cleaning method well known to those skilled in the art.
[0026] The present invention has no special limitation on the magnetron sputtering equipment, and a magnetron sputtering apparatus well known to those skilled in the art can be used. In the...
Embodiment 1
[0031] Titanium-aluminum-chromium-nickel alloy is used as the target, and the molar ratio of titanium, aluminum, chromium and nickel is 7:1.5:1:0.5; the power of magnetron sputtering is 90W, the sputtering pressure is 0.7Pa, and the argon gas The flow rate is 40sccm, the sputtering temperature is room temperature, and the red glass surface is sputtered for 2 minutes to obtain a corrosion-resistant film layer with a thickness of 200nm. The red glass is transparent glass and nickel oxide and chromium oxide are arranged on the transparent glass surface according to 1 : 1 mixed functional film layer.
Embodiment 2
[0033] Titanium-aluminum alloy is used as the target material, and the molar ratio of titanium and aluminum-nickel elements is 1:1; the power of magnetron sputtering is controlled to 90W, the sputtering pressure is 0.5Pa, the flow rate of argon gas is 40sccm, and the sputtering temperature is room temperature , sputter coating on the red glass surface for 1 min to obtain a corrosion-resistant film with a thickness of 50 nm.
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