Silicon dioxide microsphere three-dimensional full-morphology detection device and detection method thereof

Abstract

The invention discloses a silicon dioxide microsphere three-dimensional full-morphology detection device which comprises an X-ray tube, a grating G0, a rotary table, a diaphragm, a zone plate, a grating G1, a grating G2, a scintillator, a microscope objective and a receiver. The device is suitable for three-dimensional full-morphology detection of silicon dioxide microspheres of several to dozensof microns; three gratings are adopted to improve the detection sensitivity, and x-ray phase contrast imaging is realized; the zone plate is matched with the diaphragm to improve the detection resolution so as to realize 360-degree X-ray micro-imaging of the rotating microsphere. All projection surfaces of the microspheres are imaged to obtain phase contrast images of the projection surfaces of the microspheres, then the cross-sectional image of the microspheres is calculated through the phase contrast images, and a three-dimensional digital model of the microspheres is reconstructed by usingcross-sectional splicing software. The platform can be used for detecting the three-dimensional full morphology, including the internal structure, of the silicon dioxide microspheres and is high in resolution ratio and imaging contrast ratio and is suitable for micron-order microspheres.

Description

technical field [0001] The invention belongs to the technical field of optical detection, in particular to a three-dimensional full shape detection device and a detection method of silicon dioxide microspheres. Background technique [0002] Silica microspheres are non-toxic, non-polluting, high-strength, high-toughness, good stability, large specific surface area, high mechanical strength inorganic non-metallic nanomaterials, widely used in photonic crystals, sensors, chemical catalysis, biomedicine Science, polymer composite materials and other research fields. [0003] Silica microspheres can be roughly divided into three categories according to their morphology, namely ordinary silica microspheres, mesoporous silica microspheres and porous silica microspheres. The particle size range of the microsphere is about 0.1-50 microns, the pore size range is about ten or tens of nanometers, and the shell thickness of the hollow microsphere is on the order of tens of nanometers. ...

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Problems solved by technology

However, none of these methods can characterize the internal structure of microspheres without damage.

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