Optical measurement system

An optical measurement system and optical unit technology, applied in optical radiation measurement, measurement device, color/spectral characteristic measurement, etc., can solve the problems of increased system complexity and reduced grating light energy utilization, and achieve reduced complexity and easy Engineering realization, the effect of reducing the number of parts

Pending Publication Date: 2020-08-04
南京引创光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The use of beam splitting prisms and gratings will increase the complexity of the system, and at the s

Method used

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Example Embodiment

[0030] Example one

[0031] This embodiment provides a method such as Figure 1-2 Optical measurement system shown. The optical measurement system includes a light source (the light source in this embodiment is a linear light source 1), a first optical unit, a second optical unit, a dispersive element (in this embodiment, the dispersive prism 12 is used as a preferred solution for description), and a linear array detection Detector 16, area array detector 14, main control system 17. After the light beam emitted by the continuous-spectrum linear light source 1 is transmitted through the first optical unit, the emitted light beam is split by the second optical unit. The light emitting side of the first optical unit can also be provided with a first slit 5, the light beam emitted by the light source is transmitted through the first optical unit and irradiated on the first slit 5, and the light emitting surface of the light source is conjugated to the object image of the first slit...

Example Embodiment

[0036] Example two

[0037] In the present invention, the dispersive element used in the spectral decoding part may be a single dispersive optical element or a combination of dispersive optical elements. When the dispersive element is a combination of dispersive optical elements, the dispersive element is composed of two, three, or multiple optical elements glued together, or the combination of separated optical elements has a dispersion function. Taking the dispersive prism 12 as an example, the dispersive prism 12 may be a single prism or a combination of prisms. It is sufficient that the formed assembly has a dispersion function.

[0038] Among them, this embodiment provides a image 3 In the alternative solution shown, the dispersive prism 12 in this embodiment is formed by gluing two prisms (ie, the first glued dispersion monomer 121 and the second glued dispersion monomer 122). The structure in which the dispersion prism 12 is composed of three or more prisms glued together...

Example Embodiment

[0040] Example three

[0041] This embodiment provides a method such as Figure 5 Optical measurement system shown. The composition of the optical measurement system is basically the same as that of the first embodiment. The main difference is that the position of the optical prism 6 in the bi-telecentric objective lens unit is different. The beam splitting prism 6 can also be placed in the middle of the first objective lens 7 and the second objective lens 9. position.

[0042] In this embodiment, the preferred structure of the second optical unit is a bi-telecentric objective lens unit including a beam splitter 6 (such as a beam splitter prism), a first objective lens 7 and a second objective lens 9, and the second objective lens 9 emits different wavelength The beam has axial dispersion in the direction of the optical axis, so that different heights correspond to the same line length. The beam splitter 6 is arranged between the first objective lens 7 and the second objective le...

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PUM

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Abstract

The invention discloses an optical measurement system. The optical measurement system comprises a light source, a first optical unit, a second optical unit, a dispersion element, a linear array detector, an area array detector and a main control system. A light beam emitted by the light source is transmitted by the first optical unit, then the emitted light beam is split by the second optical unit, and a light beam penetrating through the second optical unit is focused on a measured object along the optical axis direction. The light beam reflected or scattered by the measured object is partially reflected by the second optical unit and then is focused on the dispersion element, the front surface of the dispersion element reflects part of light beams before dispersion to the linear array detector, and part of light beams penetrating through the front surface of the dispersion element are focused on the area array detector. The light waves at different angles correspond to different imaging heights, and the main control system decodes the information of the measured object according to a pre-stored algorithm. According to the invention, the gray level image and the height informationof the measured object can be obtained at the same time, the complexity of the system is reduced, and the stability is improved.

Description

technical field [0001] The present invention relates to an optical measurement system, in particular to an optical measurement system used for surface profile and topography, micro-nano level fine structure, displacement in semiconductor industry and automobile manufacturing industry, thickness of optical glass and biological film, paint and printing industry Optical measurement system for color and other measurements. Background technique [0002] Spectral confocal has many applications in the measurement of displacement, three-dimensional shape, and thickness of transparent substances. As early as the 1970s, scholar Courtney Pratt and others proposed a technology that can use the chromatic aberration of the microscope objective lens to detect surface topography. ; Later, Molesini and other scholars used a set of specially designed lenses for chromatic aberration to build a surface profiler based on the principle of spectral confocal; Boyde.A and others promoted it to the c...

Claims

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Application Information

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IPC IPC(8): G01J3/28G01J3/50G01J3/12G01B11/24G01B11/06G01N21/17G01N21/25G01N21/27
CPCG01B11/0625G01B11/24G01J3/12G01J3/2803G01J3/2823G01J3/502G01J2003/1208G01J2003/2813G01N21/17G01N21/251G01N21/27G01N2021/178
Inventor 庆祖林
Owner 南京引创光电科技有限公司
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