Z-cut lnoi electro-optic modulator with improved modulation efficiency and its application

Abstract

A Z-cut LNOI electro-optic modulator for improving modulation efficiency and its application, the Z-cut LNOI electro-optic modulator includes a substrate, the bottom of which is provided with a groove; an insulating layer, which is arranged on the substrate; a waveguide core layer, which is arranged on On the insulating layer, the tangential direction is Z-cut; the upper cladding layer is arranged on the waveguide core layer, which is used to form a refractive index difference with the waveguide core layer to limit the transmission of the light field, and at the same time serves as a support structure for the upper electrode; the signal electrode, set At the position corresponding to the optical waveguide on the cladding layer, it is used to apply an electric signal to form an electric field to perform electro-optic modulation on the light in the core layer of the waveguide; and the ground electrode, which is arranged in the groove, and the electric field between the signal electrode and the Z-cut LN the direction of the optical axis. The invention realizes nearly 100% ultra-high-efficiency electro-optic modulation of the electric field to the light field, thereby greatly reducing the half-wave voltage of the modulator and reducing the power consumption of the modulator.

Description

technical field [0001] The invention belongs to the field of integrated optics, and more specifically relates to a Z-cut LNOI electro-optic modulator for improving modulation efficiency and its application. Background technique [0002] As one of the core devices in optical communication and optical interconnection systems, the modulator realizes the conversion of electrical signals to optical signals, and its performance directly determines the performance of the entire communication system. It is used in long-distance optical communication links, data centers, supercomputers, etc. In short-distance communication interconnection application scenarios, in addition to "high speed and large capacity", "miniaturization, integration and low loss" are also important requirements and development goals, so the development of easy-to-integrate, low-power, low-cost optoelectronic devices is There is an urgent need to facilitate the development of high-speed optical communication syst...

AI Technical Summary

Problems solved by technology

The electrodes of traditional lithium niobate modulators mostly adopt the form of coplanar electrodes, and a large part of the electric field does not act on the optical field, resulting in low electro-optical modulation efficiency, high half-wave voltage, and high power consumption of the device

Images