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Vacuum gate valve

A vacuum gate and vane technology, applied in valve devices, valve details, sliding valves, etc., can solve the problems of lack of economy, reduced operating efficiency, complex structure, etc., to ensure reliability, prevent corrosion, and ensure economic effects.

Active Publication Date: 2022-04-08
茶山株式会社
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in this patented technology, in addition to opening and closing the valve plate 20 of the fluid passage 11 by moving forward or backward in the sliding space 14, it also includes opening and closing by lifting and lowering in a direction parallel to the fluid passage 11. The sealing member 50 of the sliding space 14 and its driving part 60, therefore, have a problem of a complicated structure resulting in a decrease in operating efficiency and lack of economy

Method used

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  • Vacuum gate valve
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Embodiment Construction

[0024] Hereinafter, a vacuum gate valve according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0025] figure 1 and figure 2 The appearance of the vacuum gate valve 100 of the preferred embodiment of the present invention is shown.

[0026] like figure 1 and figure 2 As shown, the vacuum gate valve 100 includes: a main body 110, which is in the shape of a quadrilateral box with an open upper part; a gear box 200, which is integrated on the lower side of the main body 110, and is provided with a transmission device inside; and an upper cover 120, Installed on the open upper part of the above-mentioned main body 110 .

[0027] On the inner side of the main body 110 , a fluid channel 112 vertically passes through the main body 110 along the vertical direction. A first piping member 130 serving as an inflow portion of the vacuum gate valve 100 and a second piping member 140 serving as a discharg...

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Abstract

The present invention has the advantage that by providing airtightness when opening and closing the fluid passage, it can perfectly block the by-products flowing on the fluid passage from flowing into the valve, thereby ensuring the reliability of operation and preventing the inside of the valve from Parts are corroded, and the simple internal structure is economical. Structurally, the blade can be moved forward, backward, and up and down through a driving part (air cylinder).

Description

technical field [0001] The present invention relates to a vacuum gate valve, and more specifically to a vacuum gate valve which can perfectly block the inflow of by-products flowing on a fluid passage into the interior of the valve by providing airtightness when opening and closing the fluid passage, thereby ensuring The reliability of operation can prevent the internal parts of the valve from corrosion, and the simple internal structure is economical. Background technique [0002] Usually, the vacuum gate valve is a valve that opens and closes the fluid channel structurally by the valve body. In the industrial field, it is mainly installed between the chamber and the vacuum pump on the semiconductor or liquid crystal diode manufacturing line, and serves as a vacuum pump that transmits the vacuum pump to the chamber. Input force to open and close. [0003] In related industries, various technologies have been developed to improve the leak rate, pressure range, exhaust, and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K3/02F16K3/20F16K3/314F16K3/316F16K27/04F16K31/163F16K31/54F16K51/02
CPCF16K3/0281F16K3/0218F16K3/0254F16K3/20F16K3/314F16K3/316F16K27/044F16K31/163F16K31/54F16K51/02H01L21/02F16K27/04
Inventor 金度烈李成起
Owner 茶山株式会社