Wafer bonding structure and method
A technology for wafer bonding and bonding structure, applied in microstructure technology, microstructure device, manufacturing microstructure device, etc., can solve the problem of inability to accurately measure the wafer bonding deviation value.
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[0040] A wafer bonding structure and method proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In addition, the structures shown in the drawings are often a part of the actual structures. In particular, each drawing needs to display different emphases, and sometimes uses different scales.
[0041] see figure 1 , the present embodiment provides a wafer bonding method, the wafer bonding method comprising:
[0042] Step 1 S10: providing a first wafer and a second wafer, the first bonding structure is formed on the first wafer, and the second bonding structure is form...
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