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76results about How to "Realize accurate monitoring" patented technology

System and method for intelligent library management

Provided are a system and a method for intelligent library management. The system is characterized in that the intelligent library management system comprises a computer management system, a network data communication server, an intelligent retrieval terminal, an RFID reader-writer, RFID electronic labels, a two-dimensional code printer, book two-dimensional code labels, an RFID entrance guard safety system, a book information database server, a mobile communication network, and client application software. The system and the method for intelligent library management realize accurate monitoring of books in any positions of a stack room, improve book retrieval efficiency, and monitor books in the stack room in real time. Readers borrow books, and return books in a self-service manner, and make the books in order on shelves. The system and the method provide convenience for readers and book managers to rapidly and accurately find books and positions thereof, thereby preventing false shelf of books and shelf disorder, and simplifying operation of the book managers.
Owner:UNIV OF JINAN

Buck-type DC-to-DC converter output capacitance ESR monitoring method

The invention discloses a Buck-type DC-to-DC converter output capacitance ESR monitoring method, and belongs to the field of filter capacitor health monitoring. The method provided by the invention comprises the steps of: first, obtaining an inductive current AC component iLf_ac of inductive current iLf and an output voltage AC component vo_ac of an output voltage vo through a high-pass filter unit; and second, calculating an equivalent series resistance value ESR according to the inductive current AC component iLf_ac and the output voltage AC component vo_ac of the output voltage vo obtainedin the first step. By adopting the method provided by the invention, no additional sampling point needs to be added, the normal operation of a converter is not affected, the method is simple and easyto implement, and a basis is provided for capacitor health monitoring.
Owner:NANTONG UNIVERSITY

Self-adaptive cruise control method and device and automobile

The invention discloses a self-adaptive cruise control method and device and an automobile. The self-adaptive cruise control method comprises the steps of obtaining a position signal of the automobile; identifying a road danger level according to the position signal of the automobile; and carrying out self-adaptive cruise control on the automobile according to the road danger level. The self-adaptive cruise control method has the advantages that construction facilities or construction personnel on roads are accurately monitored on the basis of guaranteeing the self-adaptive cruise function; road faults and dangers can be found in time; the safety of the automobile can be improved; and the driving comfort is improved by using a controller to carry out smooth processing on the torque.
Owner:BEIJING ELECTRIC VEHICLE

Metro tunnel deformation real-time monitoring and early warning system based on laser ranging principle

The invention provides a real-time monitoring and early warning system for subway tunnel deformation based on the principle of laser ranging, mainly including a data acquisition system and a data display and processing system. The present invention is different from the traditional laser interferometric distance measuring device. The reflective target on the track subgrade and the surrounding rock of the tunnel can produce displacement changes due to subsidence of the subgrade and deformation of the tunnel structure. The displacement of each data acquisition module is determined by Fourier Ye established a continuous function for overall control, and calculated the displacement of the corresponding reflective target through the relative changes of the two functions, and then judged whether the tunnel is deformed, which can realize 24-hour uninterrupted monitoring of tunnel deformation. The present invention utilizes 6LoWPAN network to transmit the measurement data to the upper computer, which has low cost, low power consumption, low complexity, small and flexible collection nodes and easy networking, avoids various disadvantages of traditional wired cable transmission, and can be used for subway tunnels Real-time and reliable monitoring of deformation.
Owner:ANHUI UNIV OF SCI & TECH

Method and system for monitoring icing thickness of overhead power transmission line based on laser coloring

The invention discloses a method and system for monitoring the icing thickness of an overhead power transmission line based on laser coloring. The method comprises the following steps of: A, receiving a monitoring command of the icing thickness of the overhead power transmission line or setting the monitoring arrival time of the icing thickness of the overhead power transmission line; B, coloring the overhead power transmission line according to the monitoring command or the monitoring arrival time; and C, acquiring a clear outline of the overhead power transmission line by shooting the colored overhead power transmission line, and calculating the icing thickness value of the overhead power transmission line by refereeing to the outline of a non-iced overhead power transmission line. Due to the adoption of the technical scheme, accurate monitoring of the icing thickness of the overhead power transmission line is realized, reliable data support is provided for avoidance of the icing disasters of the power transmission line for the power department, the power accident incidence rate caused by icing disasters is remarkably lowered, the running safety and reliability of a power grid and the intelligent ice disaster resisting level of the power grid are greatly increased, and huge economic benefit and social benefit are achieved.
Owner:AEROSPACE SCI & IND SHENZHEN GROUP

Target surface focal spot monitoring device

The present invention provides a target face focal spot monitoring device for laser target practice, and includes a parallel laser beam emitting light path, a target face imaging light path, a ray axis meeting system, and an image receiving system. The parallel laser beam emitting light path is used to emit a simulated laser beam. The target face imaging light path receives the scattered light emitted by the target face focal spot, and forms an image for the target face. The ray axis meeting system realizes the meet of the ray axis of the target face focal spot monitoring device and the ray axis of the target practice beam. The image receiving system is used to receive the image of the target face formed by the target face imaging light path and to display the image on a monitor. By calculating the size of the image of the target face received by a CCD vidicon, the actual size of the target face focal spot can be determined accurately. The device of the present invention can provide a parallel laser beam of which caliber is identical with that of the actual target practice laser beam, simultaneously can also monitor the target spot with a higher magnification to improve the adjustment precision of the target mirror, and then the efficiency of the laser target practice can be improved.
Owner:SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI

Intelligent fetal heart rate monitoring device used in obstetrics and gynecology

The invention relates to an intelligent fetal heart monitoring device for obstetrics and gynecology. The monitoring device includes a bedplate, a main machine, a pillow, a controller, a monitoring mechanism, two adjusting mechanisms and four legs. The adjust mechanism comprises a side plate, an adjusting unit, a lifting assembly, a lifting plate and a support plate. The adjusting assembly comprises a conveyor belt and two adjusting units. The adjustment unit includes a first motor, a bearing, a rotating shaft and drive wheels. The monitoring mechanism includes slide rails, Pan Component, translation block, slip ring, Monitoring module, collar and directional lever, The monitoring assembly includes a probe, air pump, Piston and adjusting unit, when the intelligent fetal heart rate monitoring device for obstetrics and gynecology is used, Pregnant women lie flat on the bedplate, and the sliding rail is controlled to move to the abdominal position of the pregnant women by the adjusting mechanism for convenient monitoring. Moreover, the direction and position of the probe are adjusted by the monitoring mechanism, and the probe is kept fixed after the probe is close to the abdomen of thepregnant women, so as to prevent shaking, thereby realizing the accurate monitoring of the fetal heart and improving the practicability of the equipment.
Owner:SHENZHEN LEILING GUANGTONG TECH DEV CO LTD

Buck-type loss tangent value monitoring method and system for output capacitor of DC/DC converter

The invention discloses a Buck-type loss tangent value monitoring method and system for an output capacitor of a DC / DC converter. The method includes steps of 1, enabling inductance current iLf and output voltage vo to pass through a high-pass filtering unit so as to acquire AC components; 2, calculating a cross correlation coefficient according to the acquired inductance current AC component iLf_ac and the output voltage AC component vo_ac; 3, estimating the loss tangent value tan Delta of the capacitor according to the cross correlation coefficient obtained through calculation. The method provided by the invention does not need external sampling points and does not influence normal working of the converter, and is simple and easy in implementation, and provides a basis for health monitoring of the capacitor.
Owner:NANJING UNIV OF AERONAUTICS & ASTRONAUTICS

Motor monitoring system based on machine learning

PendingCN108960423ARealize multi-device monitoringRealize accurate monitoring of equipmentCharacter and pattern recognitionTransmissionData transmissionWi-Fi
The present invention provides a motor monitoring system based on machine learning. The system comprises a data obtaining layer, a data transmission layer, an industrial cloud platform and an application layer. The data obtaining layer is mainly physical device for data collection; the data transmission layer employs the Ethernet or Wi-Fi to perform data transmission and uploads the data to the industrial cloud platform through a gateway; the industrial cloud platform is formed by a physical resource layer, a resource management layer, a service layer and a data processing layer; the application layer comprises device monitoring, fault diagnosis, fault prediction and life cycle prediction. The motor monitoring system obtains data of the motor in real time and performs processing, generatesa motor operation mode self-learning dynamic model to provide support for improving the technologies of the motor such as fault diagnosis and prediction, and the system structure can be extended to achieve multi-device monitoring and accurate monitoring of the device.
Owner:QINGDAO PENGHAI SOFT CO LTD

Intermittent-rainfall-induced accumulation-type slope landslide monitoring model and stability detection method

The invention discloses an intermittent-rainfall-induced accumulation-type slope landslide monitoring model and a stability detection method. The monitoring device comprises a slope model, an artificial rain-making device, an image acquisition device, a data processing terminal and a plurality of different-emitting-color LED assemblies. The artificial rain-making device is arranged above a slope; the LED assemblies serve as feature points and are fixedly arranged onto the slope surface; the image acquisition device sends collected image data of the LED assemblies to the data processing terminal; and the data processing terminal processes the image data to obtain a digitalized slope hook surface of the slope. The monitoring model can carry out monitoring on intermittent-rainfall-induced slope model surface displacement; slope model surface displacement monitoring precision is high; data acquisition can be done conveniently and quickly; structure is simple; device cost is low; economical and efficient effects are achieved; and an accurate stability detection result is obtained.
Owner:江苏盐综产业投资发展有限公司

Wheel hub temperature monitoring and control voice

The invention provides a wheel hub temperature monitoring and control voice prompt device. According to the device, each temperature measurement device is fixed to one wheel hub; a temperature display screen comprises a plurality of display areas, and each display area is connected with the corresponding temperature measurement device and displays the temperature of the corresponding wheel hub monitored by the temperature measurement device; a temperature alarm is connected with the temperature measurement devices and used for giving out a sound prompt when the temperature of one or more wheel hubs is higher than preset temperature; one end of each water spraying device is connected with a water outlet of a water tank, the other end of each water spraying device is connected with a plurality of water pipes, each water pipe is aligned with one wheel hub, and a water pipe outlet of each water spraying device is provided with an electromagnetic valve; a microcontroller is connected with the temperature measurement devices and the water spraying devices and used for analyzing and judging the temperature monitored by the temperature measurement devices and controlling turn-on and turn-off of the electromagnetic valves of the water spraying devices; a water level sensor is fixed in the water tank and used for monitoring water level data of the water tank; a water level alarm is connected with the water level sensor and used for giving out a warning when the water level in the water tank is lower than a preset water level.
Owner:吕渊

AGV material transfer trolley

The invention provides an AGV material transfer trolley and relates to an industrial detection device. The AGV material transfer trolley comprises a transporting trolley, a lifting device, a rotatingdevice, an image acquisition device and a first transmission mechanism. The rotating device comprises a rotating part capable of executing rotary motions and also comprises a fixed part. A rotary limiting mechanism is arranged between the rotating part and the fixed part and used for limiting a rotation angle of the rotating part. The lifting device is installed on the rotating part. The image acquisition device comprises a connecting structure and an image acquisition mechanism. The image acquisition mechanism is installed at the top of the lifting device through a connecting mechanism and can swing through the connecting mechanism. The first transmission mechanism is installed at the end of the lifting device. The first transmission mechanism can drive a video acquisition device to swingin a certain range. The transporting trolley comprises a movable transporting trolley chassis structure. The rotating device is installed on the transporting trolley chassis structure.
Owner:WATRIX TECH CORP LTD +1

Oil volume change monitoring method based on Beidou communication vehicle communication terminal

The invention provides an oil volume change monitoring method based on Beidou communication vehicle communication terminal, and relates to an oil volume change monitoring method. The method is capable of achieving the purpose of real-time monitoring of a volume change of oil in the transport process. The oil volume change monitoring method comprises a vehicle terminal, a Beidou communication unit and a collection system, wherein the Beidou communication unit communicates with a Beidou communication satellite; a GPRS module is arranged at the vehicle terminal for achieving remote wireless communication; a Beidou positioning module is arranged to quickly and effectively position the position, so that the navigation reliability of the vehicle terminal is improved. Meanwhile, by a WiFi module area network, calculation of the oil volume change is achieved through an algorithm and accurate monitoring of the oil in the transport process is achieved. When the oil volume changes, the changed volume is transmitted to the vehicle communication terminal for displaying and alarming, therefore, the oil volume change monitoring method is suitable for the oil in the transport process.
Owner:AEROSPACE HI TECH HLDG GROUP

Intelligent book retrieval monitoring system and method

An intelligent book retrieval monitoring system and method are disclosed and characterized in that the intelligent book retrieval monitoring system includes a computer management system, a network data communication server, an intelligent retrieval terminal, an RFID reader-writer, an RFID electronic tag and a book information database server. The computer management system is connected with the network data communication server and the book information database server. The network data communication server is connected with the computer management system, the intelligent retrieval terminal and the RFID reader-writer. The intelligent book retrieval monitoring system and method achieve accurate monitoring of books at any position in a stack, improve the efficiency of book retrieval, monitor the books in the stack in real time, assist readers and library management staff in quickly and accurately finding books and positions, and simplify the work of library management staff.
Owner:UNIV OF JINAN

Method for monitoring C value of output filter capacitor of Buck type DC-DC converter

The invention belongs to the technical field of converter output filter capacitor health monitoring, and discloses a method for monitoring the C value of an output filter capacitor of a Buck type DC-DC converter, and the method comprises the steps: 1, enabling an inductive current iLf and an output voltage vo to pass through a high-pass filtering unit, and respectively obtaining an alternating-current component iLf _ ac and an alternating-current component vo _ ac; 2, performing Hilbert transform on the obtained inductive current alternating current component iLf _ ac to obtain i 'Lf _ ac; and3, calculating the capacitance value C of the output capacitor according to the i 'Lf _ ac, vo _ ac and the switching frequency fs. The method provided by the invention does not need to add extra sampling points, does not affect the normal work of the converter, is simple and easy to implement, and provides a basis for the health monitoring of the capacitor.
Owner:NANTONG UNIVERSITY

Intelligent fire control water sprinkling system

The invention discloses an intelligent fire control water sprinkling system, and belongs to the technical field of water spraying and fire extinguishing. The intelligent fire control water sprinklingsystem is characterized by comprising a water supply source, a water pump, a pipe net, intelligent sprayers and a central control module; the water pump is used for being connected with the water supply source for water supply, one end of the pipe net is connected with the water pump, and the other end of the pipe net is provided with a plurality of water outlets; and the multiple intelligent sprayers are arranged and fixedly connected with the multiple water outlets of the pipe net, and the central control module is connected with the intelligent sprayers and the water pump. The purposes thatthe structure is simple, cost is low, response is fast, multiple safety guarantees exist, and stability and reliability are achieved are achieved.
Owner:诸暨市海王消防设备有限公司

Water-power engineering earthwork filling-digging feature monitoring method based on laser scanner

InactiveCN106968254ARealize digital reality replicationRealize remote visual interactive analysisDetails involving processing stepsFoundation testingPoint cloudLaser scanning
The invention discloses a water-power engineering earthwork filling-digging feature monitoring method based on a laser scanner. The water-power engineering earthwork filling-digging feature monitoring method is used for monitoring working face three-dimensional features and providing construction information feedback in the filling-digging construction operation process; and the water-power engineering earthwork filling-digging feature monitoring method comprises the following steps that (1) the three-dimensional laser scanner is used in the construction process for conducting three-dimensional laser scanning on filling-digging working faces, and three-dimensional point cloud data of the filling-digging working faces are obtained; (2) the point cloud data are used for achieving three-dimensional modeling and actual scenery copying on the filling-digging working faces based on a reverse modeling technology; (3) three-dimensional analysis is carried out on three-dimensional model information of the filling-digging working faces to obtain filling-digging feature information; (4) filling-digging feedback information obtained through analysis is further fed back on the basis of the filling-digging feature information; and (5) the filling-digging feedback information is sent to a construction site, and feedback control over the filling-digging construction operation is carried out. By means of the method, the technical problems in site construction operation like accurate three-dimensional modeling, filling feature information three-dimensional analysis of water-power engineering filling-digging operation are solved.
Owner:TIANJIN UNIV

Wheat stripe disease severity remote sensing monitoring method coupled with meteorological characteristic region scale

The invention relates to a wheat stripe rust severity remote sensing monitoring method coupled with the meteorological characteristic region scale. Compared with the prior art, the method irons out the defect of poor remote sensing monitoring precision of wheat stripe rust. The method comprises the following steps: acquiring remote sensing training data; screening features of the remote sensing training data; screening features of meteorological data; constructing a wheat stripe embroidery remote sensing monitoring model; training a wheat stripe embroidery remote sensing monitoring model; acquiring remote sensing data to be analyzed and extracting features; and obtaining a remote sensing monitoring result of the wheat stripe disease severity. According to the method, the severity of the wheat stripe rust on the regional scale is accurately monitored.
Owner:ANHUI UNIVERSITY

Intelligent monitoring system

The invention provides an intelligent monitoring system. The system comprises a camera shooting device, a control device and a prompting device; the camera shooting device is arranged in a monitoringarea and used for collecting an image of the monitoring area and processing the image on the basis of super-pixels; the control device is connected with the camera shooting device and the prompting device; a reference image of the monitoring area is pre-stored in the control device; the reference image is an image collected when no person exists in the monitoring area; the control device controlsthe camera shooting device to collect the image of the monitoring area every half hour, compares the image processed by the super-pixels with the reference image, and if the image of the monitoring area is not matched with the reference image, sends prompting information to the prompting device; and the prompting device comprises a voice player and a displayer which are used for broadcasting a voice and displaying the prompting information respectively. The intelligent monitoring system has the beneficial effects that the intelligent monitoring system is provided; and accurate monitoring and timely prompting of the monitoring area are realized.
Owner:深圳市鑫汇达机械设计有限公司

Household intelligent medicine chest system and intelligent monitoring method thereof

The invention discloses a household intelligent medicine chest system and an intelligent monitoring method thereof. The system comprises a medicine chest client, a data acquisition module, a microcomputer, a microcontroller, a stepping motor and a medicine chest for placing medicines; the microcomputer, the microcontroller and the stepping motor are all arranged on the pesticide box; the data acquisition module is used for detecting and acquiring the physical condition information of the user; the microcomputer is used for face recognition and artificial intelligence deep learning, and interacts the recognized determined symptoms with the microcontroller to allow the user to take related drugs; and the microcontroller is used for outputting a control instruction to control the motor to control the medicine box to automatically discharge medicine. After the household intelligent medicine chest system is awakened, when awakening voice is recognized as a diagnosis instruction, traditionalChinese medicine inspection inquiry diagnosis is carried out, diagnosed data are matched based on the cloud database and the deep learning model, common diseases are diagnosed, and treatment suggestions or medicines are provided.
Owner:GUANGZHOU UNIVERSITY

Method for monitoring ESR of direct-current bus capacitor of two-stage single-phase inverter

The invention discloses a method for monitoring the ESR of the direct-current bus capacitor of a two-stage single-phase inverter. The method comprises the steps that: 1, high-pass filtering is carriedout on direct-current bus voltage vbus to obtain a direct-current bus voltage alternating-current component vbus_ac; 2, performing synchronous sampling on the direct-current bus voltage alternating-current component vbus_ac and an inverter inductive current iL2; 3, denoising the sampled DC bus voltage AC component vbus_ac and the inverter inductive current iL2; 4, obtaining a peak value iL2_peakof the denoised inverter inductive current iL2 and a voltage break variable delta vbus_ac of the direct current bus voltage alternating current component vbus_ac at the corresponding moment; and 5, calculating the value of the ESR of the direct current bus capacitor according to the obtained peak value iL_2peak and the voltage break variable delta vbus_ac. The method provided by the invention doesnot need to add extra sampling points, does not affect the normal work of the converter, is simple and easy to implement, and provides a basis for the health monitoring of the capacitor.
Owner:NANTONG UNIVERSITY

Sulfur dioxide sensor based on organic field effect transistor and preparation method thereof

The invention discloses a sulfur dioxide sensor based on an organic field effect transistor and a preparation method thereof. The sensor comprises a substrate, a gate electrode, a gate insulating layer, an organic semiconductor layer, a source electrode and a drain electrode, an ultrathin anthocyanidin-coenzyme Q10 composite layer is arranged between the organic semiconductor layer and the sourceelectrode and between the organic semiconductor layer and the drain electrode, and the organic semiconductor material is a soluble organic semiconductor material. According to the invention, the oxidation resistance of anthocyanin and coenzyme Q10 is utilized; the stability of the transistor device in the air is enhanced; meanwhile, the ultrathin anthocyanin-coenzyme Q10 composite layer can effectively fill up the defects on the surface of the organic semiconductor layer and reduce the defect state density, so that the mobility of the gas sensor is improved, the electrical property of the device is improved, and the complexity of a rear-end adaptive circuit is reduced.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Greenhouse gas monitoring method based on artificial intelligence and related equipment

The invention provides a greenhouse gas monitoring method and device based on artificial intelligence, electronic equipment and a storage medium. The greenhouse gas monitoring method based on artificial intelligence comprises the following steps: collecting concentration values of different greenhouse gases at different elevation values of a plurality of observation points to obtain observation data of the observation points; constructing observation vectors of all greenhouse gases at each observation point according to the observation data, and taking the observation vectors of the same kind of greenhouse gases as an observation matrix of the greenhouse gases; calculating the spatial distribution characteristics of each greenhouse gas based on the observation matrix, and making a flight monitoring scheme to collect the concentration value of each greenhouse gas to obtain greenhouse gas data; and monitoring spatial distribution characteristics of the greenhouse gases to obtain abnormal greenhouse gases, and formulating a new flight monitoring scheme to update greenhouse gas data. According to the invention, the flight monitoring scheme can be formulated in a targeted manner to ensure the accuracy of the greenhouse gas data, the spatial distribution of the greenhouse gas is monitored, the greenhouse gas data is updated in time, and precise monitoring of the greenhouse gas is realized.
Owner:PINGAN INT SMART CITY TECH CO LTD

Artificial intelligence-based fire monitoring method and device and storage medium

The invention relates to the technical field of artificial intelligence, and discloses an artificial intelligence-based fire monitoring method, which comprises the following steps: performing region division processing on an acquired sample image, and acquiring each sub-region corresponding to the sample image; obtaining an RGB mean value of each sub-region, and determining a target risk region in all the sub-regions based on the RGB mean value and a preset risk threshold value; preprocessing a sample image containing the target risk area, and forming training data based on the preprocessed sample image; training a preset neural network model based on the training data until the neural network model converges to a preset range, and forming a fire monitoring model; and based on a real-time monitoring video and the fire monitoring model, carrying out real-time fire monitoring on a monitoring area of the monitoring video. The application scene and accuracy of fire monitoring can be improved.
Owner:PINGAN INT SMART CITY TECH CO LTD

Gas multipath online monitoring system

The invention provides a gas multipath online monitoring system. Multiple sampling branches are arranged, so that gas sampling on multiple positions is realized, omnibearing monitoring can be performed on a field environment, control on on-off of each sampling branch is realized by controlling an electronic control switch on each sampling branch, the electronic control switch of a corresponding branch is turned on when monitoring specific to certain positions needs to be performed, and the electronic control switches of the rest of branches are turned off, so that accurate monitoring on a gasis realized; and a pressure relief branch is arranged, and an electronic control switch on the pressure relief branch is controlled to be turned on when a high pressure environment is detected, so that a certain amount of gas is discharged out, and pressure of the gas entering a gas detector can be effectively adjusted.
Owner:HENAN HANWEI ELECTRONICS

Multi-angle image collecting equipment

PendingCN109451282AIncrease heightQuickly adjust the rotation positionClosed circuit television systemsStands/trestlesEngineering
The invention provides multi-angle image collecting equipment, comprising a lifting device, a rotating device, an image collecting device and a first transmission mechanism, wherein the rotating device comprises a driving device, a mounting seat and a rotation limiting mechanism; a fixing portion of the driving device is fixedly connected with the mounting seat; an output end of the driving deviceis fixedly connected with a rotating member, the driving device drives the rotating member to rotate, and the maximum rotating angle of the rotating member is not less than 360 degrees; a fixing partis installed on the mounting seat; the rotation limiting mechanism is arranged between the rotating member and the fixing part, and the rotation limiting mechanism is used for defining the rotating angle of the rotating member; the lifting device is installed on the rotating member; the image collecting device comprises a connecting structure and an image collecting mechanism; the image collecting mechanism is installed on the top of the lifting device through the connecting mechanism; the image collecting mechanism can swing vertically through the connecting mechanism; the first transmissionmechanism is installed on a lifting end of the lifting device; and the first transmission mechanism can drive a video collecting device to swing laterally.
Owner:WATRIX TECH CORP LTD +1

Closing distinguishing method of quasi-spherical resonant cavity

The invention relates to a closing distinguishing method of a quasi-spherical resonant cavity. The closing distinguishing method comprises the steps of 1, placing the quasi-spherical resonant cavity in a constant-temperature chamber, placing the quasi-spherical resonant cavity on an optical platform by a support, and aligning an upper hemisphere and a lower hemisphere of the quasi-spherical resonant cavity for coincidence and alignment by an alignment ring; 2, completing coincidence and alignment of the two hemispheres, and introducing stable flow amount of high-purity low-temperature gas intothe quasi-spherical resonant cavity to complete connection and debugging of an experiment system; and 3, performing closing operation of the quasi-spherical resonant cavity, achieving accurate monitoring of a gap between an upper hemisphere equatorial plane and a lower hemisphere equatorial plane during the closing process by accurate measurement and control of a microwave signal and real-time calculation of relative excessive half width, and achieving accurate distinguishing on closing of the quasi-spherical resonant cavity according to a change trend of the relative recess half width. The new closing judging method has universality on a quasi-spherical structure, and quantitative comparison among different methods is facilitated by an evaluation index such as a perfect closing index.
Owner:TECHNICAL INST OF PHYSICS & CHEMISTRY - CHINESE ACAD OF SCI

Wafer bonding structure and method

The invention provides a wafer bonding structure and method, and the method comprises the following steps: providing a first wafer and a second wafer, forming a first bonding structure on the first wafer, and forming a second bonding structure on the second wafer, wherein a first alignment pattern and a first measurement pattern are formed on the first bonding structure, and a second alignment pattern and a second measurement pattern are formed on the second bonding structure. The first alignment pattern and the second alignment pattern are aligned, and the first measurement pattern corresponds to the second measurement pattern. And after the first wafer and the second wafer are bonded, a deviation formed by the first measurement pattern and the second measurement pattern is obtained so asto obtain a wafer bonding deviation value. According to the invention, the first measurement pattern and the second measurement pattern are additionally arranged on the first bonding structure and the second bonding structure respectively, so that the bonding deviation value can be directly read after wafer bonding, the process can be accurately monitored, a bonding machine can be calibrated, andthe yield of devices can be improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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