Device and method for regulating and controlling three-dimensional direction intensity of focusing light spot

A focused spot and three-dimensional technology, applied in optics, optical components, laser welding equipment, etc., can solve the problems of inapplicable processing of asymmetric structures, difficulty in controlling the distribution of focused spot light intensity, etc., to achieve clear position correspondence and improve flexibility , control the effect of simple

Active Publication Date: 2020-08-28
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

[0004] In view of the above defects or improvement needs of the prior art, the present invention provides a device and method for adjusting the three-dimensional direction intensity of the focused spot. Technical Problems in Machining Asymmetric Structures

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  • Device and method for regulating and controlling three-dimensional direction intensity of focusing light spot
  • Device and method for regulating and controlling three-dimensional direction intensity of focusing light spot
  • Device and method for regulating and controlling three-dimensional direction intensity of focusing light spot

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Embodiment Construction

[0029] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0030] Since the laser pulse width is inversely proportional to the spectral bandwidth, the spectral width of the femtosecond laser cannot be ignored. The glass material from which the lens is made has dispersion effects that often distort the spot shape when focusing femtosecond laser pulses. Specifically, when focusing on the optical axis, the spectral components of different wavelengths will...

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Abstract

The invention discloses a device and method for regulating and controlling the three-dimensional direction intensity of a focusing light spot, and belongs to the field of laser processing. The devicecomprises a phase component, a first lens, a second lens and an objective lens; the phase component is used for carrying out phase modulation on the incident light beam; the first lens and the secondlens form a 4f system, and the modulated light beam is projected to the front focal plane of the objective lens; the objective lens adopts a non-achromatic lens to focus light spots, and focused lightspots in different inclination directions are generated by utilizing different dispersion effects of the lens at different focusing positions on the tensile strength of the light spots. The shape ofa focusing light spot is regulated and controlled by utilizing the dispersion effect of the objective lens, so that the light intensity distribution is adjustable in the three-dimensional direction, the method is particularly suitable for application scenes needing inclined structure processing, and the working flexibility of a laser processing system can be improved.

Description

technical field [0001] The invention belongs to the field of laser processing, and more specifically relates to a device and method for adjusting and controlling the three-dimensional direction intensity of a focused spot. Background technique [0002] In recent years, with the popularity of femtosecond lasers and the development of femtosecond laser processing technology, researchers have discovered many new characteristics and phenomena in femtosecond laser material processing. Compared with conventional continuous lasers and nanosecond laser lamps, femtosecond lasers have extremely high instantaneous power density. After focusing, nonlinear effects such as multi-photon absorption or multi-photon polymerization can be realized inside transparent materials, making three-dimensional laser direct writing Technology has developed rapidly, and a series of new applications have been derived, such as 3D laser printing, multi-dimensional optical storage, and 3D microfluidic chip m...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/09B23K26/064B23K26/06
CPCB23K26/0648B23K26/064G02B27/0927G02B27/0938G02B27/0955
Inventor 张静宇高骥超刘思垣
Owner HUAZHONG UNIV OF SCI & TECH
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