An optical resonator cryogenic temperature sensor and its preparation and packaging method

Abstract

The invention provides an optical resonator low-temperature temperature sensor and its preparation and packaging method, including a device, the device includes a wafer substrate and a temperature-sensitive film, and the temperature-sensitive film is provided with an input grating coupler, an output grating coupler and an optical signal transmission component , the optical signal transmission component includes an optical waveguide and an optical resonant cavity, the optical waveguide is coupled with the input grating coupler and the output grating coupler, the optical waveguide is used to transmit the optical signal and the optical signal coupling with the optical resonant cavity, and the optical resonant cavity is coupled to the optical field Constraining; a protective layer is placed over the temperature-sensitive film, and the protective layer is located on the top layer of the device. The invention utilizes the high transmission efficiency and high thermo-optic effect performance of the optical waveguide, has high resolution and sensitivity, and the quality factor Q value is as high as 10 5 ~10 6 , and through the design of the optical fiber groove for clamping the optical fiber, and the use of low-temperature resistant glue, the efficient coupling and packaging of the optical fiber and the grating can be realized, and the input and output of signals can still be realized in the temperature range from room temperature to low temperature.

Description

technical field [0001] The invention relates to the technical field of low-temperature temperature sensors, in particular to an optical resonator low-temperature temperature sensor and its preparation and packaging methods. Background technique [0002] Cryogenic technology is widely used in aerospace, national defense, scientific research and other fields. Therefore, the requirements for deep low temperature environments are getting higher and higher, and low temperature temperature measurement has become extremely important. At present, low temperature sensors are mainly divided into resistive temperature sensors, PN junction temperature sensors, thermocouple temperature sensors and optical temperature sensors. [0003] Optical temperature sensors are mainly based on two methods of power-temperature and wavelength-temperature for temperature detection. Because of its advantages of anti-radiation, anti-interference, low cost, small size, etc., it has been widely used in th...

AI Technical Summary

Problems solved by technology

The optical resonator is a refractive index sensitive device. It detects the target mainly according to the shift of the resonant wavelength caused by the change of the target. , therefore, at present, it is necessary to develop a low-temperature optical temperature sensor based on an optical resonator

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