Tunneling type MEMS air pressure sensor and application thereof

An air pressure sensor and tunneling technology, used in instruments, measuring fluid pressure, measuring fluid pressure through electromagnetic components, etc., can solve the problems of large air pressure sensors, difficult to realize the miniaturization design of sensors, etc., to achieve a wide application space, use Wide range of highly sensitive effects

Active Publication Date: 2020-09-22
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The air pressure sensors mentioned above are generally large in size, and it is difficult to realize the miniaturization design of the sensor

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Tunneling type MEMS air pressure sensor and application thereof
  • Tunneling type MEMS air pressure sensor and application thereof
  • Tunneling type MEMS air pressure sensor and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] This embodiment provides a volume of 1.99098×10 -13 m 3 The tunneling MEMS air pressure sensor (the side view of its structure see figure 1 ), the tunneling MEMS air pressure sensor comprises a substrate 1 and an annular metal electrode 2 and a graphene film 3 arranged on the substrate in sequence; the graphene film 3 covers the hollow cavity of the annular metal electrode 2, And the edge of the graphene film 3 is fixed on the ring-shaped metal electrode 2 through an adhesive package; the base 1 is also provided with a ring-shaped metal grid 4, and the ring-shaped metal grid 4 is mounted on the ring-shaped metal electrode 2 In the hollow cavity; the substrate 1 is also provided with a drain 5; the drain is arranged in the center of the hollow cavity of the ring-shaped metal gate;

[0053] The material of the annular metal electrode described in this embodiment is gold; the material of the annular metal grid is metallic gold; the material of the drain is metallic gold;...

Embodiment 2

[0062] The difference from Example 1 is that the thickness of the graphene film is 30nm.

Embodiment 3

[0064] The difference from Example 1 is that the thickness of the graphene film is 70nm.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
heightaaaaaaaaaa
heightaaaaaaaaaa
Login to view more

Abstract

The invention relates to a tunneling type MEMS air pressure sensor and application thereof. The tunneling type MEMS air pressure sensor comprises a substrate, an annular metal electrode and a graphenefilm, wherein the annular metal electrode and the graphene film are sequentially arranged on the substrate; and the graphene film covers a hollow cavity of the annular metal electrode, and the edge of the graphene film is arranged on the annular metal electrode. According to the invention, the graphene material is applied to the tunneling type air pressure sensor for the first time, compared witha common gold material electrode, the graphene material can effectively avoid the electromigration phenomenon, and the service life of the air pressure sensor is prolonged; meanwhile, the tunneling current is generated at the tip of the nanoscale electrode, so that the air pressure sensor is easy to miniaturize, the size and shape of the electrode can be designed according to use requirements, and various tunneling current type air pressure sensors with the same principle are designed.

Description

technical field [0001] The invention belongs to the technical field of air pressure sensors, and in particular relates to a tunneling MEMS air pressure sensor and its application. Background technique [0002] Air pressure sensors are widely used in meteorology, aerospace, deep space exploration, marine climate, airport ports, petrochemical, process equipment systems and other fields. Due to the advantages of small size, light weight, low power consumption, low cost of wafer-level mass production, and integration, microelectromechanical system (MEMS) air pressure sensors have broad application prospects and huge market potential. [0003] The commonly used air pressure sensors in the prior art mainly include capacitive, piezoresistive and resonant air pressure sensors, such as: [0004] CN108072477A discloses a MEMS air pressure sensor and a method for improving its long-term stability. The MEMS air pressure sensor includes a stress isolation substrate, and the stress isol...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00
CPCG01L9/0098
Inventor 宋学锋刘絮李成
Owner SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap