Device and method for processing micro-nano composite structure based on needle tip trajectory motion

Abstract

The invention discloses a device and a method for processing a micro-nano composite structure based on needle point trajectory motion, and relates to a device and a method for processing a micro-nanocomposite structure. A z-direction vertical micron positioning table is fixed above the base, used for driving a cutter to preliminarily approach the surface of a machined workpiece; a one-dimensionalpiezoelectric nano displacement table is fixed on the z-direction vertical micron positioning table, used for comtrolling processing depth. A needle point track motion processing module is fixed on the one-dimensional piezoelectric nano displacement table, used for controlling vertical revolution motion of the cutter. An x-y direction horizontal positioning table is fixed to the upper surface ofthe base and used for controlling horizontal machining feeding motion, the horizontal leveling table is fixed to the x-y direction horizontal positioning table and used for installing a machined workpiece and adjusting and eliminating the surface inclination of the machined workpiece, and the digital microscope is fixed to the upper surface of the base and used for detecting tool setting. A V-shaped micro-groove structure with a sub-wavelength grating on the side wall can be machined on the metal surface, and machining of a micro-nano composite hierarchical structure is achieved.

Description

technical field [0001] The invention relates to a device and a method for processing a micro-nano composite structure, in particular to a device and a method for processing a micro-nano composite structure based on a needle point track motion, belonging to the technical field of micro-nano machining. Background technique [0002] By processing a sub-wavelength grating structure on the metal surface, the surface has the function of splitting visible light, and then realizes high reflection intensity and high-resolution structural coloring on the metal surface, which is demonstrated in scientific research and industrial applications. Has great potential. At present, the typical processing method to achieve the coloring function of metal surface structure is to use laser-induced periodic stripe structure, but this method still has shortcomings in controlling the size and shape of the structure. Compared with laser-induced processing, mechanical processing has shown advantages ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a device for processing micro-nano composite structures based on needle tip trajectory motion in order to solve the problems of complex design of the vibration system and poor controllability of the tool trajectory when the sub-wavelength metal grating structure is processed by the elliptical vibration cutting technology. method, through a single feed, a V-shaped micro-groove structure with a sub-wavelength grating on the side wall is processed on the metal surface, and the processing of the micro-nano composite hierarchical structure is realized.

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