PVD device and method for preparing superhard nanocomposite coating and layer structure

Abstract

The invention provides for a PVD device and method for preparing a superhard nanocomposite coating and a layer structure. The PVD device for preparing the superhard nanocomposite coating is powered bya total power supply line. The composite PVD device comprises a shell, a workpiece frame, an ion source, a molecular pump, a cathode arc metal film coating module, a cathode magnetron sputtering metal film coating module, a cathode arc graphite film coating module and a cathode magnetron sputtering graphite film coating module. The PVD device integrates a plurality of magnetron cathodes, an arc cathode and the ion source in a vacuum coating chamber to realize the integration of a plurality of film coating processes, so that a novel coating material compounded with a plurality of film layers can be developed. According to the preparation method of the superhard nanocomposite coating, a plurality of transition layers can be prepared, and multi-layer diamond film layers with different hardness are compounded to prepare the superhard diamond coating, so that the hardness is high, and the heat resistance is good. The invention also provides the layer structure of the superhard nanocomposite coating.

Description

technical field [0001] The invention relates to the field of metal surface treatment and materials. The invention specifically relates to a PVD device, method and structure for preparing a superhard nanocomposite coating. Background technique [0002] Diamond-like carbon film is a kind of carbon material, some carbon atoms are bonded by sp3 bonds of diamond structure, and the other part of carbon-carbon atoms are bonded by sp2 chemical bonds of graphite structure, which has the excellent properties of both diamond and graphite. The diamond-like carbon film was first discovered in research in 1971. After decades of development, it has reached the semi-industrialization level. , Optical equipment and biomedicine have been industrialized, which can greatly increase the life of parts and save energy and resource consumption caused by friction and wear of parts. [0003] The further large-scale industrial application of diamond-like films still needs to solve two key problems: ...

AI Technical Summary

Problems solved by technology

[0003] The further large-scale industrial application of diamond-like films still needs to solve two key problems: on the one hand, due to the large mismatch of physical constants between diamond-like carbon and metal, glass, plastic and other substrates, the bonding force of the film base needs to be further improved On the other hand, the contradiction between the high hardness and internal stress of the diamond-like carbon film, because the sp3 bond in the metastable state at room temperature can only be formed when the internal stress is relatively large, to prepare a high-hardness diamond-like carbon film, a high sp3 bond component is required, so We have to face the problem of large internal stress, which is also the fundamental reason why the hardness of existing diamond-like film products is still far below the theoretical value

The advantages of arc ion plating are high ionization rate, fast deposition rate, and high film-substrate binding force. However, arc discharge melts the target material, which is prone to droplet splashing, and then produces large particles in the film layer. In addition, the density of arc plating film is not high. high

The advantage of magnetron sputtering coating is that the film layer is uniform and flat, and the density is high, but the deposition rate is slow, the ionization rate is low, and the film-base binding force is not high.

For the preparation of multi-layer nanocomposite coatings with ultra-high hardness (>40GPa), a single arc or magnetron sputtering process is difficult to meet the requirements

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