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Reflective terahertz time-domain spectral thickness measurement method based on evolutionary optimization algorithm

A technology of terahertz time domain and optimization algorithm, applied in the field of reflective terahertz time domain spectral thickness measurement, can solve the problems of multiple reflections of terahertz pulses, discontinuity of refractive index between interfaces, etc., to expand information extraction, realize optical Constant measurement, the effect of enhancing depth resolution

Active Publication Date: 2020-11-27
BEIJING UNIV OF TECH
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Problems solved by technology

Terahertz reflective time-domain spectroscopy system can measure the minimum thickness value d according to the single-point coating thickness extraction model min is half of the coherence length of the terahertz pulse in the dielectric layer, when the thickness of the dielectric layer is less than d min When (for thin coatings), the terahertz echo pulses overlap in the time domain, and because of the discontinuity of the refractive index between the interfaces caused by the chemical properties and structural differences of the medium layer, the terahertz pulses will have multiple reflections. When the single-point coating thickness extraction model is no longer applicable

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  • Reflective terahertz time-domain spectral thickness measurement method based on evolutionary optimization algorithm
  • Reflective terahertz time-domain spectral thickness measurement method based on evolutionary optimization algorithm
  • Reflective terahertz time-domain spectral thickness measurement method based on evolutionary optimization algorithm

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Embodiment Construction

[0031] A non-contact reflective terahertz time-domain spectroscopy detection system with self-built all-optical excitation and reception is adopted. The schematic diagram of the system composition is as follows: figure 2 shown.

[0032] The terahertz pulse is generated by the action of the femtosecond laser pulse emitted by the femtosecond laser and the photoconductive antenna, propagates in the space optical transmission system and reflects on the surface of the sample, and the terahertz reflected pulse signal carrying the sample information is received by the terahertz detection source , the reflective terahertz time-domain spectral signal is obtained after equivalent sampling through the optical delay mechanism.

[0033] Using the above-mentioned system to conduct experiments, first obtain the reference signal E of the metal substrate under the condition of vertical incidence of terahertz pulses ref , to obtain the sample reflection signal E after changing the sample sam...

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Abstract

The invention discloses a reflective terahertz time-domain spectral thickness measurement method based on an evolutionary optimization algorithm. A self-built all-optical excitation and receiving non-contact reflection type terahertz time-domain spectrum detection system is adopted, filtering noise reduction and Fourier transform are carried out on a reference signal and a sample signal, a MATLABcross-correlation function is utilized to obtain an intrinsic phase shift, and a coating sample refractive index spectrum and an extinction coefficient spectrum in a terahertz frequency band range areobtained. The constructed terahertz wave and medium interaction theoretical model becomes more accurate, full-spectrum fitting is carried out on a theoretical reflection terahertz time-domain waveform and an experimental sample signal by utilizing an evolutionary optimization algorithm, and the number of iterations or convergence precision is determined; according to the method, the constructed terahertz wave and medium interaction theoretical model is more accurate in a mode close to reality, measurement errors caused by factors such as inherent phase shift errors and metal substrate complexrefractive indexes changing along with frequency spectra are avoided, echo pulse detection precision is improved, coating detection depth resolution is enhanced, and thickness detection is achieved.

Description

technical field [0001] The invention relates to the technical field of terahertz time-domain spectrum detection, in particular to a reflective terahertz time-domain spectrum thickness measurement method based on an evolutionary optimization algorithm. Background technique [0002] With the vigorous development of aviation industry technology, protective coatings are key components of these large-scale equipment or high-end equipment, and their health status directly affects the integrity, safety and service life of the overall structure, and at the same time determines the corrosion resistance and anti-corrosion properties of components. oxidation capacity. Thickness is an important evaluation index to characterize the quality and integrity of coatings. Accurate measurement of coating thickness is of great significance to maintain the function of aerospace composite protective coatings and ensure the quality of substrate materials. Due to the complex preparation process, sp...

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Application Information

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IPC IPC(8): G01B11/06
CPCG01B11/0616
Inventor 刘增华王可心吴育衡满润昕何存富吴斌
Owner BEIJING UNIV OF TECH
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