Platform trim device and trim method of spider web type hot press based on modal drive
A hot press and platform technology, applied in the direction of presses, microstructure devices, chemical instruments and methods, etc., can solve problems such as uneven pressure, uneven chip pressure, collapse and deformation of chip microstructure, etc., and achieve high trimming accuracy, High operability and small size effect
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[0030] The present invention includes a trim module and a monitoring module, as shown in the figure, it is a spider web structure trim module of a heat press platform. The picture shows the monitoring module of the hot press platform. The trimming module includes a spider web structure, a piezoelectric ceramic sheet, and a T-shaped fixing device, and is characterized in that it realizes the lifting or lowering of the hot press platform. The monitoring module includes a laser sensor and an electromagnetic push rod, and is characterized in that the sensor can be monitored and moved in parallel. The trim module and the monitoring module are connected by a fixing device. The spider web structure parts of this device are made of integral aluminum material, the piezoelectric ceramic is made of metaniobate piezoelectric ceramic material, and the T-shaped fixed block is made of traditional steel material. The monitoring module is made of titanium alloy material as a whole.
[0031] ...
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