Spiral ring electrode silicon array detector

Abstract

The invention discloses a spiral ring electrode silicon array detector, and relates to the technical field of radiation detection. The area of a spiral ring electrode of the detector is far smaller than that of a traditional whole-surface electrode, the leakage current and capacitance are smaller, the noise is small, and the energy resolution is high. According to existing processes, the pixel canbe in a micro-nano level, and the position resolution is very high; the detector can flexibly set a pressurization mode, the design of the spiral ring enables the electrode to have enough space to serve as a reading electrode or apply bias voltage. The detector comprises a cylindrical substrate, the top surface of the substrate is provided with a cathode jointly formed by a spiral ring electrodeformed by doping and a central electrode, and the central electrode is located in the center of the spiral ring electrode. The spiral ring electrode surrounds the central electrode, the number of spiral rings of the spiral ring electrode is K, K is a positive integer, and the bottom surface of the substrate is an anode formed by doping; and an electrode contact layer is arranged on the electrode on the top surface of the substrate, SiO2 covers the part without the electrode contact layer, and an electrode contact layer is arranged on the whole electrode on the bottom surface of the substrate.

Description

technical field [0001] The invention relates to the technical field of radiation detection, more specifically, it relates to a spiral ring electrode silicon array detector. Background technique [0002] Detectors are mainly used in high-energy physics, astrophysics, etc. Silicon detectors have high detection sensitivity, fast response, strong radiation resistance, and are easy to integrate. They have important application values ​​in high-energy particle detection and X-ray detection. . [0003] The silicon detector works under reverse bias. When external particles are incident on the sensitive area inside the detector, electron-hole pairs are generated under the action of an applied voltage, and the positive electrode collects the electrons that drift to the positive electrode, while the holes will The movement towards the negative pole is collected by the negative pole, and then an electrical signal reflecting particle information is output to an external circuit. [000...

AI Technical Summary

Problems solved by technology

The anode and cathode of the entire plane of the traditional pixel silicon detector are covered by metal electrodes. Although the triangular and square arrays make the electrodes arranged in a very orderly manner, the effective electrode area of ​​this detector will be large, and the large electrode area will Will cause the detector to have a large capacitance

Too much capacitance is not good for the detector, larger capacitance will increase the leakage current and more noise, and finally reduce the energy resolution of the detector

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