Three-dimensional integrated system and preparation method thereof

Abstract

The invention provides a three-dimensional integrated system and a preparation method thereof. The integrated system comprises a nano generator, a nano capacitor structure, a first silicon through hole structure and a second silicon through hole structure. The method comprises the following steps: selecting an etching substrate, etching a plurality of silicon nano holes in the surface of the etching substrate, and preparing to obtain the nano capacitor structure; preparing the nano generator with a common electrode on the surface of the nano capacitor structure; processing the two sides of thetop of the nano generator to obtain the first silicon through hole structure and the second silicon through hole structure; and carrying out metal wiring in the first silicon through hole structure and the second silicon through hole structure to achieve conduction connection between the nano capacitor structure and the nano generator in order to obtain the final integrated system. Electric energy generated by the piezoelectric generator is stored in the nano capacitor structure to obtain continuous and stable energy output. The whole system is easy to miniaturize and occupies a small area.

Description

technical field [0001] The invention relates to the technical field of integrated circuit manufacturing technology, in particular to a three-dimensional integrated system and a preparation method. Background technique [0002] In addition to the miniaturization technology development route of devices led by Moore's Law, functional micro-nano devices are integrated to form a multi-functional micro-nano device system, and realize human health, environmental monitoring, human-computer interaction, personal electronics and biological diagnosis. The importance of large-scale networks has become increasingly prominent. Integrating embedded energy harvesting devices to form an intelligent self-powered system is an important aspect of the development of electronic devices. Self-powered devices can convert energy in the environment, such as thermal energy, solar energy, and mechanical energy, into electrical energy. Among them, nanogenerators have good prospects in self-supply, whic...

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Problems solved by technology

However, batteries are generally independent energy supply components, which are difficult to directly integrate with other devices

In addition, another disadvantage of the battery is its limited discharge efficiency

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