Atmosphere tubular furnace cooling device and cooling method

Abstract

The invention discloses an atmosphere tubular furnace cooling device and a cooling method. The cooling device comprises a gas transmission device, a water cooling device, a vacuum sealing device, an interface device and a locking device; one end of the gas transmission device is fixedly connected with the water cooling device in a sealed manner; the water cooling device is in full-plane sealing connection with the vacuum sealing device; a water inlet end opening and a water outlet end opening of the water cooling device are connected with corresponding end openings of an external water sourcethrough reducers respectively; vortexes are formed in a water path; the other end of the vacuum sealing device is connected with an end opening of a vacuum atmosphere tubular furnace through the interface device in a sealed manner; the water cooling device, the vacuum sealing device, the interface device and the end opening of the vacuum atmosphere tubular furnace are connected in a sealing mannerby the locking device; and the gas transmission device, the water cooling device, the vacuum sealing device and the interface device are concentrically connected with the vacuum atmosphere tubular furnace. The problems about heat dissipation and vacuum sealing performance of the two ends of a furnace tube of an existing atmosphere tubular furnace in the product sintering process are solved, and the cooling device is widely applied to a cooling system of the vacuum atmosphere tubular furnace.

Description

technical field [0001] The invention relates to the field of cooling devices, in particular to the field of vacuum atmosphere cooling devices, and more specifically, to a vacuum atmosphere tube furnace cooling device and a cooling method. Background technique [0002] When electronic ceramic products are sintered in an atmosphere tube furnace, it is necessary to mix nitrogen and hydrogen in a certain proportion, humidify them through a pure water tank, and then pass them into the high-temperature furnace tube to provide a sintering environment for the electronic ceramic products being sintered. For the tightness of the sintering atmosphere in the tube, one end of the furnace tube is used as air intake and the other end is used as exhaust. Water cooling and sealing devices are installed at both ends of the furnace tube to improve cooling efficiency and save gas consumption. [0003] The traditional method is to adopt the water-cooling sleeve structure, and the water-cooling s...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to solve the problem of heat dissipation at both ends of the furnace tube in the process of sintering products in the existing atmosphere tube furnace, that is, to solve the problem of pipeline cooling and vacuum sealing, so as to ensure the vacuum environment, stabilize the atmosphere environment, and ensure the safety of the working environment To ensure the batch, repeatability and reliability of sintered products

Images