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Preparation method of damp-heat-resistant low-temperature reinforced transparent conductive composite film

A transparent conductive, low-temperature strengthening technology, used in equipment for manufacturing conductive/semiconducting layers, cable/conductor manufacturing, circuits, etc., can solve problems such as peeling, loose film, and many defects

Active Publication Date: 2020-12-22
AVIC BEIJING INST OF AERONAUTICAL MATERIALS
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0003] The present invention is aimed at the deficiencies in the above-mentioned prior art and is designed to provide a preparation method of a low-temperature reinforced transparent conductive composite film resistant to heat and humidity. Sandwich multi-layer transparent conductive film is loose, has many defects, photoelectric performance deteriorates after hot and humid environment, and the film corrodes and falls off.

Method used

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  • Preparation method of damp-heat-resistant low-temperature reinforced transparent conductive composite film

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Embodiment Construction

[0028] Below in conjunction with embodiment technical solution of the present invention will be described in further detail:

[0029] In this embodiment, the material of the target for depositing the oxide strengthened film layer and the semi-metallic transition layer is ITO, IZO, AZO, GIZO or FIO; the metal target for depositing the metal layer 4 is Ag, Cu, Al, Fe, Mn or Gr; the material of the substrate 1 is glass;

[0030] The steps of the method for preparing a low-temperature reinforced transparent conductive composite film resistant to heat and humidity by adopting the technical solution of the present invention are as follows:

[0031] Step 1. Ultrasonic cleaning of the substrate 1 with acetone, petroleum ether and degreaser solution for 5 minutes to 120 minutes, then cleaning with absolute ethanol for 5 minutes to 120 minutes, and finally cleaning with deionized water for 5 minutes to 30 minutes, and drying the surface with clean air The remaining water vapor, then pl...

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Abstract

The invention relates to a preparation method of a damp-heat-resistant low-temperature reinforced transparent conductive composite film. A layer structure of the composite film sequentially comprisesa reinforced oxide layer, a semi-metallic transition layer, a metal layer and a substrate from top to bottom. The reinforced oxide layer is subjected to plasma bombardment reinforcement discontinuously by depositing an oxide thin film layer at a low temperature by means of a layer-by-layer plasma-assisted reinforcing method, then a metallic transition layer is added between the oxide layer and themetal layer, the metal layer is deposited, and the multi-layer transparent conductive composite film layer with remarkable damp-heat resistance and stability is prepared.

Description

technical field [0001] The invention relates to a preparation method of a heat-and-humidity-resistant low-temperature strengthened transparent conductive composite film, which belongs to the technical field of material surface treatment. Background technique [0002] In the future, advanced optoelectronic devices will develop in the direction of flexibility, intelligence, and reliability, and higher and higher requirements are put forward for the photoelectric composite film layer composed of inorganic and organic compounds. work reliably. The transparent conductive film prepared by low-temperature magnetron sputtering on the heat-sensitive polymer substrate has many defect channels, which makes the oxide / metal / oxide composite film poor in resistance to humid and hot environments, and is easy to corrode and fall off, which seriously restricts its application. . The oxide / metal / oxide transparent conductive film grown at low temperature has many composite film defects and is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01B13/00C23C14/35C23C14/08C23C14/14C23C14/18
CPCH01B13/0026C23C14/352C23C14/08C23C14/14C23C14/0036C23C14/185
Inventor 雷沛颜悦霍钟祺钟艳莉张旋纪建超潘兴浩李佳明
Owner AVIC BEIJING INST OF AERONAUTICAL MATERIALS