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Method for carrying out low-intensity magnetic field space imaging based on semiconductor two-dimensional electron gas

A two-dimensional electron gas and space imaging technology, which is applied in the manufacture/processing of semiconductor devices, devices applying electro-magnetic effects, and electromagnetic devices, can solve the problems of limited spatial resolution and time resolution, and high cost. Achieve the effect of low cost, high temporal resolution and high spatial resolution

Pending Publication Date: 2021-01-05
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In view of the above problems, the present invention provides a method for space imaging of weak magnetic fields based on semiconductor two-dimensional electron gas, which is used to at least partially solve the problem of the high cost of traditional weak magnetic detection and imaging methods and the extreme limitations in spatial resolution and time resolution. Technical issues such as large limitations

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  • Method for carrying out low-intensity magnetic field space imaging based on semiconductor two-dimensional electron gas
  • Method for carrying out low-intensity magnetic field space imaging based on semiconductor two-dimensional electron gas
  • Method for carrying out low-intensity magnetic field space imaging based on semiconductor two-dimensional electron gas

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preparation example Construction

[0038] On the basis of the above examples, the preparation method of AlSb / InAs / AlSb semiconductor two-dimensional electron gas, please refer to figure 2 , including: S101, at a first temperature, molecular beam epitaxy grows a GaAs buffer layer on deoxidized semi-insulating GaAs (001); S102, lowers the first temperature to a second temperature, and sequentially molecular beam epitaxy AlSb buffer layer, (Al, Ga) Sb buffer layer; S103, reduce the second temperature to the third temperature, molecular beam epitaxy AlSb / InAs / AlSb semiconductor heterojunction on the (Al, Ga) Sb buffer layer; S104, in Molecular beam epitaxy of a layer of GaAs film on the surface of AlSb / InAs / AlSb semiconductor heterojunction is used to prevent its oxidation.

[0039] The purpose of growing the GaAs buffer layer by molecular beam epitaxy is to smooth the sample surface. The purpose of molecular beam epitaxy of AlSb buffer layer and (Al, Ga)Sb buffer layer is to gradually increase the lattice consta...

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Abstract

The invention provides a method for carrying out low-intensity magnetic field space imaging based on semiconductor two-dimensional electron gas. The method comprises the following steps: S1, carryingout molecular beam epitaxial growth on a two-dimensional electron gas semiconductor heterojunction; s2, performing micro-nano processing on the two-dimensional electron gas semiconductor heterojunction to obtain a discrete Hall device of which the characteristic size is within the range of 10nm-1mm; and S3, integrating discrete Hall devices to obtain a linear array or area array weak magnetic detector so as to realize spatial imaging of a weak magnetic field. By utilizing the characteristic of high carrier mobility of semiconductor two-dimensional electron gas at room temperature, high-precision weak magnetic detection and imaging are carried out through a Hall effect principle, and the device can be used for weak magnetic detection and imaging of human bodies such as magnetocardiograms and magnetoencephalograms, and has the advantages of portability, low cost, high space and time resolution and the like.

Description

technical field [0001] The invention relates to the technical field of magnetic detection and imaging related to semiconductors, in particular to a method for performing weak magnetic field space imaging based on semiconductor two-dimensional electron gas. Background technique [0002] The human body emits a magnetic field all the time, and these magnetic signals are closely related to the health of the body. Familiar typical examples include the brain magnetic field and the cardiac magnetic field, which are produced by the bioelectric currents in the human brain and heart accompanying body activities. Similar to the widely used electroencephalogram and electrocardiogram, the corresponding magnetoencephalogram or magnetocardiogram can be obtained by measuring magnetoencephalography and magnetocardiography. A large number of existing studies have shown that the detection of the human body's magnetic field is generally safer, more effective and real-time for disease diagnosis...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L43/14H01L43/06H01L27/22H10N52/01H10N52/00
CPCH10B61/00H10N59/00H10N52/101H10N52/01
Inventor 赵建华王海龙魏其其
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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