Waveguide integrated photoelectric detector based on evanescent wave coupling mode
A photodetector and waveguide integration technology, applied in the field of integrated optoelectronics, can solve the problem of low photoelectric conversion ability and so on
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Embodiment 1
[0043] Take the ridge-type silicon waveguide and germanium light-absorbing layer as examples, such as Figure 2-3 As shown, the implementation process of the embodiment of the present invention is described in detail:
[0044] Waveguide integrated photodetectors based on evanescent wave coupling include:
[0045] Waveguide 1, light absorbing layer 2, cathode 3, anode 4 and cladding layer 5;
[0046] The wrapping layer 5 is made of silicon dioxide and wraps the waveguide 1 , the light absorbing layer 2 , the cathode 3 and the anode 4 , and the upper ends of the cathode 3 and the anode 4 are located outside the wrapping layer 5 .
[0047] The waveguide 1 is a ridge silicon waveguide. It is used to transmit optical signals. The thickest part (that is, the position of the central ridge) is 220nm or 250nm, the mainstream process index of the tape-out unit, and the width of the ridge does not exceed 1um; it has a strong ability to restrain the optical field and relatively small lo...
Embodiment 2
[0061] Such as Figure 6-7 As shown, the present invention provides another waveguide integrated photodetector based on evanescent wave coupling.
[0062] Compared with Embodiment 1, the difference is that in this embodiment: the number of the anode 4 and the high-concentration P++ doped region is one, and the high-concentration P++ doped region is located in the third doped region 103 of the waveguide 1; 4 connections;
[0063] The high-concentration N++ doped region is located in the second doped region 102 of the waveguide 1 ; and is connected to the cathode 3 .
[0064] It is understandable that for explanations, examples, beneficial effects, etc. of the relevant content of the embodiment of the present invention, reference may be made to the corresponding content in Embodiment 1, and details are not repeated here.
[0065] In summary, compared with the prior art, the present invention has the following beneficial effects:
[0066] When working, load the reverse bias vo...
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