Crystal production process

A production process and crystal growth technology, which is applied in the field of crystal processing, can solve problems such as difficult growth of crystals, insufficient uniformity of melting soup, poor crystal quality, etc., and achieve the effect of uniform melting soup, improving quality, and ensuring crystal quality
CN112210820APending Publication Date: 2021-01-12XUZHOU XINJING SEMICON TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
XUZHOU XINJING SEMICON TECH CO LTD
Publication Date
2021-01-12

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Abstract

The invention discloses a crystal production process. The crystal production process comprises the following steps: S1, putting an initial raw material into a crucible assembly; s2, the crucible assembly is heated to melt the initial raw materials, and after set time, the crucible assembly rotates at the rotating speed within the set rotating speed section; s3, after material melting is completed,a discharging assembly descends to the position above the liquid level in the crucible assembly, the distance between the discharging assembly and the liquid level is h, the discharging assembly comprises a raw material discharging pipe, and the raw material discharging pipe adds the readded raw materials into a raw material discharging area of the crucible assembly; and S4, blanking is conductedin the raw material blanking area, crystal pulling is conducted in the crystal growth area, in the step S1, the initial raw materials are loaded into a first cavity, a second cavity and a third cavity correspondingly, and the particle diameter of the initial raw materials in the first cavity is larger than the particle diameter of the initial raw materials in the second cavity and the particle diameter of the initial raw materials in the third cavity. According to the crystal production process, molten liquid in the crucible assembly can be more uniform, and the crystal quality can be improved.
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Description

technical field

[0001] The invention relates to the technical field of crystal processing, in particular to a crystal production process. Background technique

[0002] In the related art, a double-layer crucible or a quartz ring is usually used to separate the molten material area from the crystal growth area in the production of single crystal silicon by CCZ (continuous extraction method). However, in the process of crystal production, there are still problems such as insufficient uniformity of melting soup in the molten material area and crystal growth area, poor crystal quality, and easy splashing of the cutting material, which makes it difficult for crystals to grow. Contents of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. For this reason, the present invention proposes a crystal production process, which can make the melting soup in the crucible assembly more uniform, and is conducive to ...

Claims

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