The invention discloses a
microwave plasma chemical vapor deposition method and device for a submicron
diamond film. The method comprises the following steps: placing a
seed crystal substrate on a pad, placing the pad in a growth chamber of MPCVD equipment, adjusting the pressure in the growth chamber, operating a
microwave source, adjusting the temperature of the pad, and adjusting the pad to a height required by growth along with the rise of the
seed crystal substrate; the device comprises a
cushion plate, a tray, a
quartz window and a
cushion plate movement mechanism, the
cushion plate, the tray, a cooling plate and the
quartz window are sequentially arranged from top to bottom, and the cushion plate is connected to the
power output end of the cushion plate movement mechanism; and a heating device is arranged in the cushion plate. The height and the rotation rate of a growth pad are adjusted through the pad movement mechanism, the
epitaxial thin film deposition efficiency is controlled in a pad heating mode, the
deposition rate of each epitaxial area is optimized, the height of the pad is dynamically adjusted along with the increase of the height of the
seed crystal substrate in the growth process, rotation is conducted, the growth continuity and uniformity of the same seed
crystal substrate can be ensured, and the
crystal quality is ensured.