Inverted GaN power device packaging structure and preparation method thereof
A technology of power devices and packaging structures, applied in the field of manufacturing
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[0025] In order to deepen the understanding of the present invention, the specific implementation of the present invention will be described in detail below in conjunction with the accompanying drawings. This embodiment is only used to explain the present invention and does not constitute a limitation to the protection scope of the present invention.
[0026] Such as Figure 1-8 As shown, a flip-chip GaN power device packaging structure includes a ceramic substrate 1. The ceramic substrate 1 has a rectangular shape and a material thickness of 1mm. The shape of the body is inverted "concave". The bottom of the slotted tank and the back of the ceramic substrate are respectively covered with a front copper layer 41 and a rear copper layer 42. The thickness of the copper layer is 0.15mm. The upper middle of the inverted "concave" tank is coated with There is insulating varnish 2, the thickness of insulating varnish 2 is 0.015mm, there is a V groove 3 between the two sides of the l...
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