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Semiconductor wafer storage environment intelligent control equipment

A technology of intelligent control and control equipment, which is applied in the direction of control/adjustment system, non-electric variable control, and simultaneous control of multiple variables, etc. It can solve the problems of inconvenient staff management and difficult control of semiconductor wafer storage environment, etc. Achieve the effect of saving personnel costs, improving inspection efficiency, and facilitating inspection

Pending Publication Date: 2021-02-09
南京苏芯科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide an intelligent control device for semiconductor wafer storage environment, which solves the problem in the prior art that the storage storage environment of semiconductor wafers is not easy to control and is inconvenient for staff to manage

Method used

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  • Semiconductor wafer storage environment intelligent control equipment
  • Semiconductor wafer storage environment intelligent control equipment

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032]When the present invention is working, the control device 4 is fixedly connected to the surface of the wafer cabinet 3, the temperature and humidity sensor 13 and the oxygen content sensor 14 are fixedly installed inside the wafer cabinet 3, and the proximity switch sensor 15 is installed on the wafer cabinet 3. At the cabinet door of the round cabinet body 3, the cables of the temperature and humidity sensor 13, the oxygen content sensor 14 and the proximity switch sensor 15 are plugged and connected to the I / O serial port module on the surface of the equipment mainboard 6, and the input terminal of the solenoid valve 8 Connect with the nitrogen source, connect the output end of the flowmeter 9 with the wafer cabinet 3, and complete the installation of the control device 4. The power supply 11 supplies power to the control device 4. The prefabricated program is executed in the device main board 6 to control the wafer. The internal state of the cabinet 3 is monitored in r...

Embodiment 2

[0034] When the present invention controls a large number of wafer cabinets 3, a network cable is used to connect the network port module on the surface of the main board 6 of the device, and the other end is connected to the network switch 17 of the service end 1 in the factory, and each individual control device 4 passes through the socket The long-connection communication method uploads the monitoring data to the server 1, and the server 16 organizes and analyzes the data and stores them in the database 18. The factory equipment maintenance personnel can directly open the client 19 on the office computer to check the equipment status and remotely control it, which is greatly improved. Improve inspection efficiency and save personnel costs.

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Abstract

The invention discloses semiconductor wafer storage environment intelligent control equipment which comprises a server side, an operation side, a wafer cabinet body and control equipment installed onthe surface of the wafer cabinet body, the server side is connected with the operation side through the Internet, and the server side is connected with the control equipment through a cable. The control equipment comprises a shell, an equipment mainboard, an instrument panel, an electromagnetic valve, a flow meter, an alarm buzzer and a power supply, the input end of the electromagnetic valve is connected with a nitrogen source, the output end of the electromagnetic valve is communicated with the wafer cabinet body, and the flow meter is connected between the electromagnetic valve and the wafer cabinet body in series. The control equipment is further provided with a temperature and humidity sensor, an oxygen content sensor and a proximity switch sensor which are matched with data monitoring. The control equipment is arranged on the surface of the wafer cabinet body, so that various data in the wafer cabinet body can be conveniently and automatically detected, the problem of waste caused by continuously filling nitrogen into the wafer cabinet in the past is solved, and the wafer environment safety can be completely guaranteed under non-human factors.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to an intelligent control device for semiconductor wafer storage environment. Background technique [0002] Wafer is a silicon wafer used to make silicon semiconductor integrated circuits. Its main raw material is silicon. High-purity polysilicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After the silicon ingot is ground, polished and sliced, it forms a silicon wafer. [0003] Wafers are easily oxidized, so they have extremely high requirements on the temperature, humidity and oxygen content of the environment. Usually, the oxygen content is required to be less than 0.5%, the relative temperature range: 17°C-25°C, and the humidity range: 7%-25%. [0004] The existing technology is to control the temperature, humidity and oxygen content by purifying the gas. At present, nitrogen is the most used, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D27/02
CPCG05D27/02
Inventor 程标翁加林
Owner 南京苏芯科技有限公司
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