Method for preparing large-size, high-purity and high-density molybdenum trioxide target material

Abstract

The invention discloses a method for preparing a large-size, high-purity and high-density molybdenum trioxide target material. The method comprises the specific steps: 1, carrying out roasting treatment on ammonium molybdate to obtain high-purity molybdenum trioxide powder; 2, carrying out ball milling treatment on the high-purity molybdenum trioxide powder; 3, adding a certain amount of forming agent to the molybdenum trioxide powder subjected to ball milling treatment to be uniformly mixed; 4, pressing the uniformly mixed molybdenum trioxide powder into a blank; 5, drying the molybdenum trioxide blank, putting the molybdenum trioxide blank into a sheath to be vacuumized, welded and sealed, then carrying out hot isostatic pressing treatment, and removing the sheath to obtain a molybdenumtrioxide target material crude product; and 6, machining and cleaning the obtained molybdenum trioxide target material crude product to finally obtain the high-purity and high-density molybdenum trioxide target material. According to the method for preparing the large-size, high-purity and high-density molybdenum trioxide target material, the large-size, high-purity and high-density molybdenum trioxide target material can be prepared, and the preparation rate is high.

Description

technical field [0001] The invention belongs to the technical field of target preparation methods, and relates to a method for preparing large-sized, high-purity, and high-density molybdenum trioxide targets. Background technique [0002] Electrochromism refers to the reversible change between the colored state of low transmittance or the bleached state of high transmittance by injecting or extracting charges (ions or electrons) under the action of alternating high and low or positive and negative external electric fields. a special phenomenon. Tungsten trioxide is a typical representative of inorganic electrochromic materials, currently known as WO 3 Electrochromic devices that are functional materials have problems such as too heavy color and not soft enough, which seriously limit their application range, prompting people to look at MoO with similar structure. 3 A new exploration was launched. MoO 3 It is also a cathodic electrochromic material, and its discoloration m...

AI Technical Summary

Problems solved by technology

Tungsten trioxide is a typical representative of inorganic electrochromic materials, currently known as WO 3 Electrochromic devices that are functional materials have problems such as too heavy color and not soft enough, which seriously limit their application range, prompting people to look at MoO with similar structure. 3 launched a new exploration

As we all know, molybdenum trioxide has obvious sublimation phenomenon above 600°C, and this material cannot obtain high-density MoO by conventional sintering methods above 600°C. 3 target, and below 600 °C, although the sublimation phenomenon has been suppressed, the density has not been significantly improved

Although the method of hot pressing sintering can significantly improve the density, because the target size required for the industrial production of molybdenum trioxide film is generally large, and is affected by the hot pressing tonnage of hot pressing equipment, the hot pressing process is used to prepare three Molybdenum oxide target cannot get larger size molybdenum trioxide target products