Polycrystalline silicon cold hydrogenation method adopting gas-solid parallel flow downer reactor
A reactor and polysilicon technology, applied in chemical instruments and methods, silicon compounds, silicon halide compounds, etc., can solve problems such as gas short circuit, economic loss, environmental pollution, etc., and achieve single-pass yield improvement, sufficient and uniform reaction, and reaction efficiency high effect
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Embodiment 1
[0022] A single-stage gas-solid co-flow down-flow reactor (see figure 1 and figure 2 (a) The cold hydrogenation method of polysilicon comprises the following steps: silicon powder and solid catalyst CuCl are mixed with preheated H 2 and preheated vaporized SiCl 4 The gas is fed from the upper part of the single-stage gas-solid co-current down-flowing bed reactor 1, and reacted at a reaction temperature of 400°C and a reaction pressure of 1.5MPa to obtain SiHCl-containing 3 The gas-solid mixture is extracted from the bottom of the reactor and enters the gas-solid separator (cyclone separator) 2 for separation; respectively obtain SiHCl carrying a small amount of impurities 3 The gas is sent to the downstream separation and refining section, and the separated silicon powder and solid catalyst CuCl mixture is re-introduced from the upper part of the reactor to realize the recycling of silicon powder and solid catalyst.
[0023] h 2 , silicon powder, solid catalyst CuCl and S...
Embodiment 2
[0026] Adopt multistage (3 stage) gas-solid co-flow down-bed reactor (see figure 1 and figure 2 (b)) the polysilicon cold hydrogenation method, comprises the steps: silicon powder and solid catalyst Ni and the H of preheating (preheating to 600 ℃) 2 and preheated vaporized SiCl 4 The gas is added from the upper part of the reactor 1, and the reaction temperature is 600° C., and the reaction pressure is 3.5 MPa to react to obtain SiHCl-containing 3 The gas-solid mixture is extracted from the bottom of the reactor and enters the gas-solid separator (cyclone separator) 2 for separation; respectively obtain SiHCl carrying a small amount of impurities 3 The gas is sent to the downstream separation and refining section, and the mixture of the separated silicon powder and solid catalyst Ni is re-introduced from the upper part of the reactor to realize the recycling of silicon powder and solid catalyst Ni.
[0027] h 2 , silicon powder, solid catalyst CuCl and SiCl 4 The gas mas...
Embodiment 3
[0031] Adopt the polysilicon cold hydrogenation method of multi-stage (2 stages) gas-solid co-current down-flow bed reactor (see figure 1 ), comprising the steps of: silicon powder and solid catalyst (mass ratio is 1:1 of CuCl and CuCl 2 mixture) with preheated (preheated to 550°C) H 2 and preheated vaporized SiCl 4 The gas is added from the upper part of the reactor 1, and the reaction temperature is 550° C., and the reaction pressure is 3 MPa to react to obtain SiHCl-containing 3 The gas-solid mixture is extracted from the bottom of the reactor and enters the gas-solid separator (membrane separator) 2 for separation; respectively obtain SiHCl carrying a small amount of impurities 3 The gas is sent to the downstream separation and refining section, and the separated silicon powder and solid catalyst mixture is re-introduced from the upper part of the reactor to realize the recycling of silicon powder and solid catalyst.
[0032] The H 2 , silicon powder, solid catalyst an...
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