Method for calibrating system parameters of rotating device type Mueller matrix ellipsometer

Abstract

The invention belongs to the related technical field of precision optical measurement instrument system calibration, and discloses a method for calibrating system parameters of a rotating device typeMueller matrix ellipsometer, which comprises the following steps of respectively replacing an imaging lens and an objective lens of the rotating device type Mueller matrix ellipsometer with a 1 / 4 standard wave plate and a reflector, rotating the azimuth angle of the 1 / 4 standard wave plate multiple times, and acquiring light intensity information under multiple azimuth angles from a detector of the rotating device type Mueller matrix ellipsometer, performing Fourier analysis on the light intensity information to obtain a Fourier coefficient of the light intensity information, establishing a relation model between the Fourier coefficient of the light intensity information and the parameters of the system to be calibrated, and continuously adjusting the value of the system parameter to be calibrated in the relation model until the error between the Fourier coefficient in the relation model and the Fourier coefficient is within a preset range, wherein the value corresponding to the systemparameter to be calibrated is the calibration value. According to the method, calibration of a plurality of calibration values can be realized through two-step calibration, and the method is simple and convenient.

Description

Technical field[0001]The invention belongs to the technical field related to the calibration of precision optical measuring instrument systems, and more specifically relates to a method for calibrating system parameters of a rotating device-type Muller matrix ellipsometer.Background technique[0002]Rotating device type ellipsometer is a common type of ellipsometer, which has the advantages of simple modulation, high measurement accuracy, and non-destructive measurement. Rotating device-type high-resolution imaging Muller matrix ellipsometer is based on the dual-rotation compensator-type Muller matrix ellipsometer, combined with microscopic imaging technology, using the Muller matrix containing more polarization information, can completely characterize the sample The polarization characteristics, such as depolarization, and so on, at the same time have a high spatial resolution, can realize the distribution measurement of the micro-area material, so it has greater advantages than the ...

AI Technical Summary

Problems solved by technology

[0004] The existing calibration methods rarely consider the polarization aberration of the objective lens during calibration, or use offline calibration to calibrate the beam splitter and objective lens. The calibration process is cumbersome, the calibration error is large, the calibration speed is slow, and the universality is poor. Precise Measurement Requirements of Rotating Device Type High Resolution Imaging Mueller Matrix Ellipsometer

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