Low-power-consumption CBRAM device based on titanium-silver alloy and preparation method and application of low-power-consumption CBRAM device
A low-power, alloy technology, applied in the field of information storage, can solve the problems of low energy consumption and difficult to achieve, and achieve the effects of reducing energy consumption, improving stability, and concentrating resistance distribution.
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Embodiment 1
[0053] like figure 1 As shown, the invention provides a kind of low power consumption CBRAM device based on titanium-silver alloy, comprising:
[0054] bottom electrode 1;
[0055] Insertion layer 2, located on the surface of one side of the bottom electrode 1;
[0056] The resistance switch layer 3 is located on the surface of the insertion layer 2 away from the bottom electrode 1;
[0057] The top electrode 4 is located on the surface of the resistive layer 3 away from the bottom electrode 1;
[0058] Wherein, the material of the insertion layer 2 is Ti and Ag alloy materials.
[0059] It should be noted that, in the embodiment of the present application, the material of the bottom electrode 1 is one of Ti, Pt, W or TiN, the material of the resistive layer 3 is an oxygen-containing germanium telluride material, and the oxygen-containing germanium telluride material is GeO x , the material of the top electrode 4 is one of Pt or Ti; the thickness of the bottom electrode 1...
Embodiment 2
[0072] The CBRAM device in this embodiment has the same structure and preparation method as the CBRAM device in Embodiment 1. The difference is that in the step of preparing the insertion layer in this embodiment, the sputtering power of the silver target is 20W, and other parameters are Same as Example 1.
Embodiment 3
[0074] The CBRAM device in this embodiment has the same structure and preparation method as the CBRAM device in Embodiment 1. The difference is that in the step of preparing the insertion layer in this embodiment, the sputtering power of the silver target is 40W, and other parameters are Same as Example 1.
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