A film-like diffusion source forming machine

Abstract

The invention discloses a film-like diffusion source molding machine, which mainly relates to the technical field of semiconductor film production equipment. The other end of the spraying device is equipped with a cutting device, and a drying device is provided on one side of the spraying device, which improves the constraint on the movement direction of the beam, makes the movement and stroke less susceptible to external influences, and makes the spraying of the nozzle more uniform, both The drying efficiency is improved, and the water vapor can be discharged in time, which ensures the improvement of the drying quality, increases the space utilization of the drying device, and makes the film drying process more efficient, energy-saving and environmentally friendly. Under the action, the cutting blade on the cutter seat fixed at the bottom of the sliding sleeve cuts on the flat roller belt, forming an inclined straight line angle cutting, which is quick and convenient to adjust, and the role of the guide transmission is relatively stable to improve the film slitter cutting products Quality stability.

Description

technical field [0001] The invention mainly relates to the technical field of semiconductor film production equipment, in particular to a film-like diffusion source forming machine. Background technique [0002] Semiconductor materials are the main materials of microelectronics and optoelectronic devices, especially the integration of components on large-scale integrated circuits is getting higher and higher, and the size of components is getting smaller and smaller. Semiconductor thin films are the basic materials for such devices. Semiconductor thin films are mainly film-like diffusion sources containing phosphorus and boron, but the production of such film-like diffusion sources is relatively difficult, and there is currently no published technology for reference. Contents of the invention [0003] In view of the deficiencies and defects in the prior art, the object of the present invention is to provide a film-like diffusion source forming machine. [0004] In order t...

AI Technical Summary

Problems solved by technology

Semiconductor thin films are mainly film-like diffusion sources containing phosphorus and boron, but the production of such film-like diffusion sources is relatively difficult, and there is currently no published technology for reference.

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