Tank body alternating type vacuum furnace for producing silicon monoxide and preparation method
A silicon oxide and vacuum furnace technology, applied in the direction of silicon oxide, furnace, charge, etc., can solve the problems of unstable vacuum degree of equipment, long refueling process, poor performance of silicon monoxide, etc., achieve fast cooling speed, improve Product capacity, reduce the effect of low temperature side reactions
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Embodiment 1
[0042] Such as figure 1 , 2As shown, a tank rotating vacuum furnace for producing silicon oxide includes a tank 1, the tank 1 includes a reaction part 2 and a collection part 3, and the inside of the reaction part 2 and the collection part 3 are respectively equipped with The cavity is used to place the reaction chamber for raw materials and the collection chamber for collecting the reacted products. The reaction part 2 and the collection part 3 are communicated through the sealing connection part 4, so that the reaction part 2 and the collection part 3 in the tank body 1 are sealed and connected. A valve is installed on the inlet and outlet of the reaction part 2 or the collection part 3, and the valve controls the connection or closure between the reaction chamber and the collection chamber. The heating furnace 7 is provided with a heating chamber matching the size of the reaction part 2 of the tank body 1, the reaction part 2 of the tank body 1 is arranged in the heating c...
Embodiment 2
[0056] Such as image 3 , 4 As shown, the difference between this embodiment and Embodiment 1 is that the heating furnace 7 is formed by two and a half furnace bodies hinged through the rotating shaft 12, and when it is necessary to put in or take out the tank body 1, the half furnace body can be rotated to , thereby opening or closing the heating furnace 7, the tank body 1 is loaded into the heating furnace 7 or taken out from the heating furnace 7 through the suspension ring 10; under the premise of ensuring good sealing, the present embodiment further improves the speed and production efficiency of the product preparation.
Embodiment 3
[0058] Such as Figure 5 , 6 As shown, the difference between this embodiment and Embodiment 1 is that the equipment includes 16 tank bodies 1, and for those skilled in the art, the number of tank bodies 1 should be reasonably set according to the production needs and the size of the heating furnace 7. Not limited to this embodiment, this embodiment is provided with a plurality of tank bodies 1, which further improves the use efficiency of the heating furnace and the speed and efficiency of preparing products.
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Abstract
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