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Mask plate and preparation method thereof

A technology of mask plate and area, which is applied in the direction of vacuum evaporation plating, coating, electric solid device, etc., can solve the problems of poor driving backplane, mask plate and driving backplane motherboard, etc.

Active Publication Date: 2021-03-19
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The present invention provides a mask plate and its preparation method to solve the problem that the existing mask plate and the driving backplane motherboard are easily not tightly bonded during the evaporation process, which leads to various defects in the driving backplane. The problem

Method used

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  • Mask plate and preparation method thereof
  • Mask plate and preparation method thereof
  • Mask plate and preparation method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0038] refer to figure 2 , shows a schematic structural diagram of a mask according to Embodiment 1 of the present invention. The mask plate 20 can be used to prepare the driving backplane motherboard 10 through the evaporation process. In practical applications, the mask plate 20 can be used to prepare the driving backplane display in the driving backplane motherboard 10 through the evaporation process. area. refer to figure 1 , the drive backplane motherboard 10 includes: a backplane area 11 , a transition area 12 between the backplane areas 11 , and an edge area 13 surrounding the backplane area 11 and the transition area 12 . Wherein, a plurality of driving backplanes 111 are arranged in an array in the backplane area 11 .

[0039] like figure 2 As shown, the mask plate 20 includes: a first area 21 corresponding to the edge area 13, and a second area 22 corresponding to the transition area 12, that is, when the mask plate 20 is connected to the drive backplane mother...

Embodiment 2

[0057] refer to Figure 7 , shows a flow chart of steps of a method for preparing a mask according to Embodiment 2 of the present invention. The mask plate is used to prepare a driving backplane mother board through an evaporation process, and the driving backplane mother board includes: a backplane area, a transition area between the back plane areas, and an edge area surrounding the back plane area and the transition area. The method specifically may include the following steps:

[0058] Step 701: Provide a mask substrate; the mask substrate includes a first region corresponding to the edge region, and a second region corresponding to the transition region.

[0059] In this step, firstly, a mask substrate may be provided, and optionally, the mask may be INVAR (Invar, a nickel-iron alloy containing 35.4% nickel). The reticle substrate may include a first region corresponding to the edge region, and a second region corresponding to the transition region.

[0060] Step 702: ...

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Abstract

The invention provides a mask plate and a preparation method thereof, and relates to the technical field of display. A mother board of a driving back plate comprises back plate areas, a transition area between the back plate areas, and an edge area surrounding the back plate areas and the transition area. The mask plate comprises a first area corresponding to the edge area and a second area corresponding to the transition area. The second area is provided with at least one first half-etching sub-area, and the thickness of the first half-etching sub-area is smaller than the thickness of the first area. According to the mask plate and the preparation method thereof provided by the invention, at least one first half-etching sub-area can be arranged in the second area, corresponding to the transition area of the mother board of the driving back plate, of the mask plate, and the thickness of the first half-etching sub-area is smaller than the thickness of the first area, corresponding to the edge area of the mother board of the driving back plate, of the mask plate, so that the weight of the middle of the mask plate can be reduced, the amount of sagging when the mask plate and the mother board of the driving back plate are attached may be reduced, and the mask plate and the mother board of the driving back plate may be more closely attached, thereby preventing the driving back platefrom experiencing various undesirable problems.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a mask plate and a preparation method thereof. Background technique [0002] Today, OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) driver backplanes can be manufactured through OLED G6 Half production lines. [0003] At present, when the OLED G6 Half production line produces the driving backplane motherboard, the driving backplane motherboard can be prepared through the evaporation process. In this process, the mask plate can be bonded to the driving backplane motherboard, so that Control the evaporation area of ​​the film layer. However, in the process of applying the above technology, the inventors found that during the evaporation process, the mask plate and the driver backplane mother board are very likely to be not tightly bonded, which will lead to poor color mixing of the made driver backplane. Uniformity, uneven shadow of pixel graphics and many othe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/04
CPCC23C14/24C23C14/042H10K71/00H10K71/231C23F1/02H10K71/166
Inventor 徐鹏嵇凤丽
Owner BOE TECH GRP CO LTD