Ultrasound, laser and machine combined machining method, ultrasonic vibration clamp, machine tool and laser device

Abstract

The invention relates to an ultrasound, laser and machine combined machining method, an ultrasonic vibration clamp, a machine tool and a laser device. Under the condition that a to-be-machined workpiece generates ultrasonic vibration, laser generated by the laser device roughly machines the to-be-machined workpiece, and a damage layer with cracks is generated on the to-be-machined workpiece through laser machining; ultrasonic vibration is used for increasing expansion of the damage layer, and then finish machining is conducted on the to-be-machined workpiece through a cutter. The ultrasonic vibration is beneficial to disengagement of molten drops generated after the laser ablates the to-be-machined workpiece, so that the contact between the to-be-machined workpiece and the laser is increased. The laser ablation effect can cause the surface of the to-be-machined workpiece to generate the damage layer with microcracks, under the action of ultrasonic vibration, after the microcracks are formed, due to the existence of high-frequency vibration, stress in the material is released more completely, the expansion of the microcracks is stably enlarged, and then the expansion of the damage layer is stably expanded; and in this way, removal of the material can be facilitated when the cutter conducts finish machining on the machined workpiece, the cutting force and cutter abrasion are reduced, and the machining efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of methods for processing hard and brittle materials, in particular to an ultrasonic laser mechanical composite processing method, an ultrasonic vibration fixture, a machine tool and a laser. Background technique [0002] Difficult-to-machine hard and brittle materials represented by ceramics, glass, sapphire, etc., have the characteristics of corrosion resistance, high temperature resistance, wear resistance, high hardness, and high brittleness, and are widely used in various industries such as consumer electronics, semiconductors, molds, solar energy, and aerospace . [0003] Hard and brittle materials are typical difficult-to-machine materials. The commonly used processing methods for hard and brittle materials are grinding and milling. High, it is easy to produce microscopic cracks, resulting in serious surface and subsurface damage. [0004] Using laser to process hard and brittle material workpieces,...

AI Technical Summary

Problems solved by technology

However, due to the large damage caused by high-power laser processing, the entire workpiece will be cracked, and it is difficult to realize the stable expansion of cracks on the workpiece, and the stable expansion of the damaged layer cannot be guaranteed.

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