MOS gate-controlled thyristor with parasitic diode and manufacturing method thereof
A technology of parasitic diodes and thyristors, applied in the field of MOS gate-controlled thyristors and its manufacturing, can solve problems such as device failure and pulse system failure, and achieve the effect of avoiding failure
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[0037] Below in conjunction with accompanying drawing and embodiment, describe technical solution of the present invention in detail:
[0038] figure 1 is a schematic structural diagram of an MCT, which has a parasitic thyristor structure, which has a large di / dt when it is turned on, and a small conduction voltage drop when it is turned on. However, when applied to pulse discharge, due to its large di / dt, a large induced electromotive force will be generated on the parasitic inductance from the cathode of the device to the ground, and the potential difference between the two ends of the gate capacitor will increase to exceed the gate oxide Layer breakdown voltage (V OX ) will result in breakdown of the gate oxide layer, thereby rendering the pulsed system ineffective.
[0039] figure 2 It is a schematic structural diagram of a MOS gate-controlled thyristor with a parasitic diode in an embodiment. Compared with the conventional MCT, the cathode metal 8 in the structure of...
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