OLED device transparent cathode and manufacturing method thereof

A technology of a transparent cathode and a manufacturing method, applied in the field of OLED display, can solve problems such as poor process matching, film damage, etc., achieve good surface coverage, reduce unevenness, and meet brightness requirements and current driving capabilities.

Inactive Publication Date: 2021-04-13
NANJING GUOZHAO OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] In order to solve the above problems, the embodiment of the present invention provides a transparent cathode for OLED devices and its manufacturing method, which effectively avoids the defects of poor process matching or film damage in the field of transparent cathode layer of OLED in the preparation method in the prior art.

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  • OLED device transparent cathode and manufacturing method thereof
  • OLED device transparent cathode and manufacturing method thereof

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Embodiment Construction

[0035] The purpose of the present invention is to design a transparent conductive cathode film that can significantly improve the transparency and conductivity of the OLED transparent cathode layer in view of the problem that the existing OLED transparent cathode layer has poor compatibility with light transmittance and conductivity.

[0036] The embodiments of the present invention will be preferably described below in conjunction with the embodiments.

[0037] Such as Figure 1-Figure 2 Shown, the fabrication method of OLED device transparent cathode comprises:

[0038] The manufacturing process of the transparent cathode film layer as the transparent cathode layer is as follows: a transparent and conductive cathode film is directly deposited on the surface of the OLED device by atomic layer deposition;

[0039] When the atomic layer deposition method is prepared, diethyl zinc is used as the zinc source material, trimethylaluminum is used as the aluminum source material, an...

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Abstract

The invention discloses an OLED device transparent cathode and a manufacturing method thereof. The manufacturing method comprises the following steps of directly depositing a transparent conductive cathode film on the surface of an OLED device by adopting an atomic layer deposition method, and during preparation of the atomic layer deposition method, using diethyl zinc as a zinc source material, trimethylaluminum as an aluminum source raw material, and hydrogen peroxide as an oxygen source raw material. The defect of poor process matching degree or thin film damage in the field of transparent cathode layers of OLEDs in the preparation method in the prior art is effectively avoided.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of a transparent cathode for an OLED device and its manufacture, especially to the technical field of OLED display, and specifically to a transparent cathode for an OLED device and a manufacturing method thereof. Background technique [0002] OLED, or Organic Light-Emitting Diode (OLED), is a new type of display device developed in the middle of the 20th century. OLED has many advantages such as ultra-thin, all-solid-state, active light-emitting, fast response, high contrast, no viewing angle limit, wide operating temperature range, low power consumption, low cost, strong shock resistance and flexible display, and is known as "" Dream Display". The superior performance and huge market potential of OLED displays have attracted many manufacturers and scientific research institutions all over the world to invest in the production and research and development of OLED devices. OLED is a cu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/52H01L51/56C23C16/40C23C16/455
CPCC23C16/403C23C16/407C23C16/45529C23C16/45553H10K50/828H10K71/00
Inventor 刘腾飞杨建兵彭劲松白羽秦昌兵
Owner NANJING GUOZHAO OPTOELECTRONICS TECH CO LTD
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