Microwave power source, microwave plasma system, ignition method and self-tuning method

A technology of microwave plasma and microwave power, which is applied in the field of plasma systems, can solve the problems of poor time-varying adjustment, difficulty in realizing automatic ignition, and large differences in load matching states.
CN112654128APending Publication Date: 2021-04-13苏州迈微能等离子科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
苏州迈微能等离子科技有限公司
Publication Date
2021-04-13

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Abstract

The invention discloses a microwave power source, a microwave plasma system, an ignition method and a self-tuning method. The microwave power source comprises: a microwave signal generator used for generating a microwave signal; a signal adjusting unit used for adjusting the amplitude and phase of the microwave signal and loading pulse signals with different frequencies and duty ratios; a semiconductor amplification unit; a signal transmission and load detection unit used for sending the microwave signal amplified by the semiconductor amplification unit to a load and detecting the sent microwave signal and a microwave reflection signal generated by the load to obtain a detection sampling signal; and a control unit used for receiving and analyzing the detection sampling signal so as to control the signal emission frequency of the microwave signal generator and / or control the adjusting mode of the signal adjusting unit according to the analysis result. According to the invention, automatic ignition frequency searching, an automatic ignition process and a self-tuning process are achieved, and the problems that existing traditional microwave plasma equipment is difficult to ignite automatically and work stably are solved.
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Description

[0001] Cross References to Related Applications

[0002] This application claims priority to the Chinese Patent Application No. 2020101914439 filed with the China Patent Office on March 18, 2020, the entire contents of which are incorporated herein by reference. technical field

[0003] The invention relates to the technical field of plasma physics, in particular to a microwave power source, a microwave plasma system, an ignition method and a self-tuning method. Background technique

[0004] Microwave plasma refers to the use of electromagnetic wave transmission energy to excite gas to generate ionization to form plasma. Compared with other methods to stimulate plasma, microwave plasma has the following advantages: 1. Higher degree of ionization and decomposition, 2. Higher electron temperature, thus Reach a lower plasma temperature, 3. There is no electrode, and there will be no pollution caused by electrode loss. 4. The working pressure range is wide and can be applied to...

Claims

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