Mask, evaporation device and evaporation method
A technology of reticle and mask, which is applied in the field of reticle, can solve the problems that the mask cannot be fully stretched, affects the yield rate, and poor color mixing, so as to avoid poor color mixing and improve the yield rate
Active Publication Date: 2021-04-16
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology
[0008] An object of the present invention is to provide a mask plate, which can solve the problem in the prior art that the mask sheet cannot be fully stretched during evaporation, resulting in poor color mixing and affecting the yield.
Method used
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Embodiment 2
[0061] The reticle structure in this embodiment includes the shielding strips similar to those in Embodiment 1, and also has a convex portion 21 and side wings 22 connected to both sides of the convex portion 21, which is roughly the same as the corresponding structure in Embodiment 1. , for the same structure, refer to the corresponding description in Embodiment 1, which will not be repeated here. Wherein the main difference between the two is that the convex portion 21 is hemispherical, please refer to Figure 7 , Figure 7 A schematic cross-sectional structure diagram of the reticle 100 provided by the embodiment of the present invention.
[0062] The beneficial effect of the present invention is that: the present invention provides a mask plate, an evaporation device and an evaporation method. A convex portion 21 is provided at the middle position of the shielding strip 20. When the mask plate 100 is bonded to the glass substrate 200, the glass substrate 200 is pressed T...
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The invention discloses a mask, an evaporation device and an evaporation method. The mask comprises a mask frame, a support structure, at least a mask sheet and at least two shielding strips, wherein the support structure is fixed on the mask frame; the at least one mask sheet is arranged on the support structure; the shielding strips are provided with a length direction and a width direction, and in the width direction, each shielding strip comprises a convex part located in the middle of the shielding strip and side wings connected to the two sides of the convex part; and the shielding strips are fixed to the support structure, the side of each mask sheet elastically abuts against the side wings of the shielding strip, and the shielding strip can be bent in the reverse direction with the convex part to enable the mask sheet and the shielding strips to be connected in a seamless mode. By arranging the convex part in the middle of the shielding strip, when the mask is attached to glass substrate, the glass substrate presses the convex part to enable the shielding strip to be bent in the reverse direction with the convex part, so that the mask sheet and the shielding strip are connected in a seamless mode, the mask sheet can be completely stretched, the problem of poor color mixing is avoided, and the yield is increased.
Description
technical field [0001] The present application relates to the field of reticles, in particular to a reticle, an evaporation device and an evaporation method. Background technique [0002] With the continuous development of display technology, common displays include liquid crystal display (Liquid Crystal Display, LCD), organic electroluminescence display (Organic Light Emitting Diode, OLED), plasma display (Plasma Display Panel, PDP) and electronic ink (Electronic Ink) display etc. Due to the advantages of low power consumption, thinness, high color gamut, high display brightness, wide viewing angle, and fast response speed, organic electroluminescent displays are becoming more and more popular in the market. [0003] In the production process of organic light-emitting diodes, the method of mask evaporation is usually used to form organic light-emitting functional layers (including cathode, anode, electron transport layer, electron blocking layer, hole transport layer, hole...
Claims
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IPC IPC(8): C23C14/04C23C14/24
Inventor 吴秋杰
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD